Fast synthesis of graphene films by precursor-gas preheating thermal chemical vapor deposition
Yu, Chongsheng1,2; Wei, Dapeng1,2
刊名Gongneng Cailiao/Journal of Functional Materials
2015
卷号46期号:16页码:16110-16114
ISSN号10019731
DOI10.3969/j.issn.1001-9731.2015.16.019
其他题名石墨烯薄膜的前驱气体预热化学气相沉积快速制备方法
通讯作者Wei, Dapeng
英文摘要

Graphene has been considered as promising material for next generation transparent electrodes due to its excellent optical, electrical, and mechanical properties, but unfortunately the practical use of graphene in end-product devices has not been demonstrated since the yield, size and uniformity problems are yet to be solved to satisfy industrial standards. Here we show large-area monolayer graphene films by precursor-gas preheating thermal chemical vapor deposition (PT-CVD), which enabled mass-produced and larger production of graphene film over 300 mm×300 mm PET substrate area with an optical transmittance of over 95% and a sheet resistance of (146±15) Ω/sq. The uniformity, transmittance and sheet resistance properties of graphene had been characterized by using scanning electron microscope (SEM), Raman spectroscopy, UV-Vis spectrophotometer and four point probe resistivity tester. Finally, we successfully patterned graphene micro/nano-structure and solved vacuum lamination problems for graphene-based truly multi-touch capacitive touch panels in mobile phones. ©, 2015, Journal of Functional Materials. All right reserved.

语种中文
内容类型期刊论文
源URL[http://119.78.100.138/handle/2HOD01W0/4609]  
专题微纳制造与系统集成研究中心
通讯作者Wei, Dapeng
作者单位1.Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing, China;
2.Chongqing Engineering Research Center of Graphene Film Manufacturing, Chongqing Graphene Technology Company Limited, Chongqing, China
推荐引用方式
GB/T 7714
Yu, Chongsheng,Wei, Dapeng. Fast synthesis of graphene films by precursor-gas preheating thermal chemical vapor deposition[J]. Gongneng Cailiao/Journal of Functional Materials,2015,46(16):16110-16114.
APA Yu, Chongsheng,&Wei, Dapeng.(2015).Fast synthesis of graphene films by precursor-gas preheating thermal chemical vapor deposition.Gongneng Cailiao/Journal of Functional Materials,46(16),16110-16114.
MLA Yu, Chongsheng,et al."Fast synthesis of graphene films by precursor-gas preheating thermal chemical vapor deposition".Gongneng Cailiao/Journal of Functional Materials 46.16(2015):16110-16114.
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