Fast synthesis of graphene films by precursor-gas preheating thermal chemical vapor deposition | |
Yu, Chongsheng1,2; Wei, Dapeng1,2![]() | |
刊名 | Gongneng Cailiao/Journal of Functional Materials
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2015 | |
卷号 | 46期号:16页码:16110-16114 |
ISSN号 | 10019731 |
DOI | 10.3969/j.issn.1001-9731.2015.16.019 |
其他题名 | 石墨烯薄膜的前驱气体预热化学气相沉积快速制备方法 |
通讯作者 | Wei, Dapeng |
英文摘要 | Graphene has been considered as promising material for next generation transparent electrodes due to its excellent optical, electrical, and mechanical properties, but unfortunately the practical use of graphene in end-product devices has not been demonstrated since the yield, size and uniformity problems are yet to be solved to satisfy industrial standards. Here we show large-area monolayer graphene films by precursor-gas preheating thermal chemical vapor deposition (PT-CVD), which enabled mass-produced and larger production of graphene film over 300 mm×300 mm PET substrate area with an optical transmittance of over 95% and a sheet resistance of (146±15) Ω/sq. The uniformity, transmittance and sheet resistance properties of graphene had been characterized by using scanning electron microscope (SEM), Raman spectroscopy, UV-Vis spectrophotometer and four point probe resistivity tester. Finally, we successfully patterned graphene micro/nano-structure and solved vacuum lamination problems for graphene-based truly multi-touch capacitive touch panels in mobile phones. ©, 2015, Journal of Functional Materials. All right reserved. |
语种 | 中文 |
内容类型 | 期刊论文 |
源URL | [http://119.78.100.138/handle/2HOD01W0/4609] ![]() |
专题 | 微纳制造与系统集成研究中心 |
通讯作者 | Wei, Dapeng |
作者单位 | 1.Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing, China; 2.Chongqing Engineering Research Center of Graphene Film Manufacturing, Chongqing Graphene Technology Company Limited, Chongqing, China |
推荐引用方式 GB/T 7714 | Yu, Chongsheng,Wei, Dapeng. Fast synthesis of graphene films by precursor-gas preheating thermal chemical vapor deposition[J]. Gongneng Cailiao/Journal of Functional Materials,2015,46(16):16110-16114. |
APA | Yu, Chongsheng,&Wei, Dapeng.(2015).Fast synthesis of graphene films by precursor-gas preheating thermal chemical vapor deposition.Gongneng Cailiao/Journal of Functional Materials,46(16),16110-16114. |
MLA | Yu, Chongsheng,et al."Fast synthesis of graphene films by precursor-gas preheating thermal chemical vapor deposition".Gongneng Cailiao/Journal of Functional Materials 46.16(2015):16110-16114. |
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