Fabrication of large area diffractive optical elements by laser direct writing

doi:10.1109/3M-NANO.2016.7824973

CORC > 重庆绿色智能技术研究院 > 中国科学院重庆绿色智能技术研究院 > 精准医疗单分子诊断技术研究中心

	Fabrication of large area diffractive optical elements by laser direct writing
	Wang, Yunjiao; Zhang, Weiguo; Yang, Zheng; Xiong, Xin; Xia, Liangping; Gao, Mingyou; Zhang, Dong; Wang, Deqiang; Yuan, Jiahu
	2016
会议日期	July 18, 2016 - July 22, 2016
会议地点	Chongqing, China
DOI	10.1109/3M-NANO.2016.7824973
页码	51-54
通讯作者	Wang, Deqiang (dqwang@cigit.ac.cn)
英文摘要	We present a method to fabricate diffractive optical elements (DOEs) with four phase levels by the Laser Direct Writing technology. One computation method is provided to optimize the step depth, which could improve efficiency of DOEs. The step depth and imaging results demonstrate the fabricated DOEs devices with good optical properties. The effective areas of the DOEs pattern are as large as 49 cm2, which could be replicated easily for mass production applications. © 2016 IEEE.
会议录	6th IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, IEEE 3M-NANO 2016
语种	英语
内容类型	会议论文
源URL	[http://119.78.100.138/handle/2HOD01W0/4843]
专题	精准医疗单分子诊断技术研究中心中国科学院重庆绿色智能技术研究院微纳制造与系统集成研究中心集成光电技术研究中心
作者单位	Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing; 400714, China
推荐引用方式 GB/T 7714	Wang, Yunjiao,Zhang, Weiguo,Yang, Zheng,et al. Fabrication of large area diffractive optical elements by laser direct writing[C]. 见:. Chongqing, China. July 18, 2016 - July 22, 2016.