Influence mechanism of laser conditioning on the microcosmic properties of HfO_2 optical thin films | |
Yang Lihong1; Xue Pengcheng1; Wang Tao2; Su Junhong1 | |
刊名 | Journal of Optoelectronics·Laser |
2018 | |
卷号 | 29期号:2页码:187-196 |
关键词 | Hfo_2 Thin Film Polishing Laser Conditioning Oxidizing |
ISSN号 | 1005-0086 |
其他题名 | 激光预处理对HfO_2光学薄膜微观性能的影响 |
产权排序 | 2 |
英文摘要 | n 1-on-1 case the influence of laser conditioning on the microscopic morphology and structure of HfO_2 optical thin film is studied. The HfO_2 thin films were irradiated with 10%,30%,50% and 70% of the threshold energy in 1-on-l. In order to research the microscopic morphology of HfO_2 optical thin film,the film surface areas of 10 m* 10 m and 3 m* 3 m were tested with atomic force microscope. Comparing laser conditioning with non-laser conditioning, the thin film being irradiated contains less impurities and its cone-shaped structure becomes smooth. The microscopic structure of thin film was tested with X-ray diffraction and X-ray photoelectron spectroscopy. Comparing laser conditioning with non-laser conditioning, the crystalline structure, the chemical bond and the element valence of thin film being irradiated are not changed. The components of thin film were tested with X-ray photoelectron spectroscopy. Comparing laser conditioning with non-laser conditioning,the thin film being irradiated contains less hafnium and more oxides of hafnium. The experimental results show that the laser conditioning plays an important role in polishing and oxidizing HfO_2 thin film. |
WOS研究方向 | Physics |
语种 | 中文 |
内容类型 | 期刊论文 |
源URL | [http://ir.opt.ac.cn/handle/181661/30083] |
专题 | 西安光学精密机械研究所_检测技术研究中心 |
作者单位 | 1.Shool of Optoelectronics Engineering,Xi'an Technological University, Xi'an, Shaanxi 710021, China 2.Xi'an Institute of Optics and Precision Mechanics,Chinese Academy of Sciences, Xi'an, Shaanxi 710119, China |
推荐引用方式 GB/T 7714 | Yang Lihong,Xue Pengcheng,Wang Tao,et al. Influence mechanism of laser conditioning on the microcosmic properties of HfO_2 optical thin films[J]. Journal of Optoelectronics·Laser,2018,29(2):187-196. |
APA | Yang Lihong,Xue Pengcheng,Wang Tao,&Su Junhong.(2018).Influence mechanism of laser conditioning on the microcosmic properties of HfO_2 optical thin films.Journal of Optoelectronics·Laser,29(2),187-196. |
MLA | Yang Lihong,et al."Influence mechanism of laser conditioning on the microcosmic properties of HfO_2 optical thin films".Journal of Optoelectronics·Laser 29.2(2018):187-196. |
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