Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 信息光学与光电技术实验室

	Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration
	Lu, Yancong; Wei, Chunlong; Jia, Wei; Li, Shubin; Yu, Junjie; Li, Minkang; Xiang, Changcheng; Xiang, Xiansong; Wang, Jin; Ma, Jianyong
刊名	Opt. Commun.
	2016
卷号	380 页码:382
通讯作者	chazhou@mail.shcnc.ac.cn
英文摘要	An optical encoder based on symmetric Littrow configuration is presented. Although the grating is one dimensional, both horizontal and vertical displacement can be measured simultaneously. The angle between grating vector and horizontal movement is taken into account in the measurement results, which not only decreases the requirement of installation but also decreases the cosine error. Thanks to the short grating period of 561.8 nm, a high resolution of 0.137 nm is obtained. The measurement results of optical encoder are compared with that of commercial laser interferometer. The coincident results demonstrate that the encoder should be a useful optical measurement device for detecting two-dimensional movement. (C) 2016 Published by Elsevier B.V.
收录类别	SCI
资助信息	National Natural Science Foundation of China (NSFC) [61405214, 61308077, 61127013]
WOS记录号	WOS:000382793800056
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/28531]
专题	上海光学精密机械研究所_信息光学与光电技术实验室
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	Lu, Yancong,Wei, Chunlong,Jia, Wei,et al. Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration[J]. Opt. Commun.,2016,380:382.
APA	Lu, Yancong.,Wei, Chunlong.,Jia, Wei.,Li, Shubin.,Yu, Junjie.,...&Zhou, Changhe.(2016).Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration.Opt. Commun.,380,382.
MLA	Lu, Yancong,et al."Two-degree-freedom displacement measurement based on a short period grating in symmetric Littrow configuration".Opt. Commun. 380(2016):382.