Characterization and FDTD simulation analysis on light trapping structures of amorphous silicon thin films by laser irradiation

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 空间激光信息技术研究中心

	Characterization and FDTD simulation analysis on light trapping structures of amorphous silicon thin films by laser irradiation
	Shi, Weimin; Huang, Lu; Jin, Jing; Yuan, Zhijun; Yang, Weiguang; Wang, Linjun; Zhou, Jun; Lou, Qihong
刊名	Superlattices Microstruct.
	2016
卷号	93 页码:290
通讯作者	lhuang@shu.edu.cn
英文摘要	The effect of laser energy density on the light-trapping structures of amorphous silicon (alpha-Si) thin films is studied both theoretically and experimentally. The thin films are irradiated by a frequency-doubled (lambda = 532 nm) Nd:YAG pulsed nanosecond laser. An effective finite difference time domain (FDTD) model is built to find the optimized laser energy density (E-L) for the light trapping structures of alpha-Si. Based on the simulation analysis, it shows the variation of reflection spectra with laser energy density. The optimized reflection spectra at E-L = 1000 mJ/cm(2) measured by UV-visible spectroscopy confirms to agree well with that corresponding to the depth to diameter ratio (h/D) in the FDTD simulation. The surface morphology characterization by optical microscope (OM) and scanning electron microscope (SEM) accords fairly well to of light-trapping modeling in the simulation. (C) 2016 Elsevier Ltd. All rights reserved.
收录类别	SCI
资助信息	National Science Foundation of China [61404080, 51202139]
WOS记录号	WOS:000376213000034
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/28364]
专题	上海光学精密机械研究所_空间激光信息技术研究中心
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	Shi, Weimin,Huang, Lu,Jin, Jing,et al. Characterization and FDTD simulation analysis on light trapping structures of amorphous silicon thin films by laser irradiation[J]. Superlattices Microstruct.,2016,93:290.
APA	Shi, Weimin.,Huang, Lu.,Jin, Jing.,Yuan, Zhijun.,Yang, Weiguang.,...&Lou, Qihong.(2016).Characterization and FDTD simulation analysis on light trapping structures of amorphous silicon thin films by laser irradiation.Superlattices Microstruct.,93,290.
MLA	Shi, Weimin,et al."Characterization and FDTD simulation analysis on light trapping structures of amorphous silicon thin films by laser irradiation".Superlattices Microstruct. 93(2016):290.