Optical surfacing via linear ion source

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 中科院强激光材料重点实验室

	Optical surfacing via linear ion source
	Wu, Lixiang; Wei, Chaoyang; Shao, Jianda
刊名	Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms
	2017
卷号	397 页码:82
通讯作者	wulx@hdu.edu.cn ; siomwei@siom.ac.cn ; jdshao@siom.ac.cn
英文摘要	We present a concept of surface decomposition extended from double Fourier series to nonnegative sinusoidal wave surfaces, on the basis of which linear ion sources apply to the ultra-precision fabrication of complex surfaces and diffractive optics. The modified Fourier series, or sinusoidal wave surfaces, build a relationship between the fabrication process of optical surfaces and the surface characterization based on power spectral density (PSD) analysis. Also, we demonstrate that the one-dimensional scanning of linear ion source is applicable to the removal of mid-spatial frequency (MSF) errors caused by small-tool polishing in raster scan mode as well as the fabrication of beam sampling grating of high diffractive uniformity without a post-processing procedure. The simulation results show that optical fabrication with linear ion source is feasible and even of higher output efficiency compared with the conventional approach. (C) 2017 Elsevier B.V. All rights reserved.
收录类别	SCI
资助信息	Youth Innovation Promotion Association of the Chinese Academy of Sciences
WOS记录号	WOS:000399627100012
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/28143]
专题	上海光学精密机械研究所_中科院强激光材料重点实验室
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	Wu, Lixiang,Wei, Chaoyang,Shao, Jianda. Optical surfacing via linear ion source[J]. Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms,2017,397:82.
APA	Wu, Lixiang,Wei, Chaoyang,&Shao, Jianda.(2017).Optical surfacing via linear ion source.Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms,397,82.
MLA	Wu, Lixiang,et al."Optical surfacing via linear ion source".Nucl. Instrum. Methods Phys. Res. Sect. B-Beam Interact. Mater. Atoms 397(2017):82.