High resolution patterning on AgInSbTe thin films by laser thermal lithography

	High resolution patterning on AgInSbTe thin films by laser thermal lithography
	Zhou, Qijun; Zhang, Kui; Wei, Tao; Wei, Jingsong
	2016
通讯作者	weijingsong@siom.ac.cn
英文摘要	Fabrication of high-resolution micro-structures is essential for DOEs and MEMS and has attracted increasing attention. In this study, several high-resolution micro-structures have been fabricated on AgInSbTe phase-change films by laser thermal lithography, and the minimum linewidth of these structures is about 200 nm, which is smaller than the size of the focused spot. The results indicate that laser thermal lithography is a simple and effective technique for the fabrication of micro-structures on AgInSbTe phase-change thin films.
会议录	2016 International Workshop on Information Data Storage and Tenth International Symposium on Optical Storage
语种	英语
ISSN号	0277-786X
内容类型	会议论文
源URL	[http://ir.siom.ac.cn/handle/181231/27431]
专题	上海光学精密机械研究所_高密度光存储技术实验室
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	Zhou, Qijun,Zhang, Kui,Wei, Tao,et al. High resolution patterning on AgInSbTe thin films by laser thermal lithography[C]. 见:.