High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 强场激光物理国家重点实验室

	High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions
	Qiao, Lingling; Tan, Yuanxin; Wang, Zhaohui; Chu, Wei; Liao, Yang; Cheng, Ya
刊名	Opt. Mater. Express
	2016
卷号	6 期号:12 页码:3787
通讯作者	ya.cheng@siom.ac.cn
英文摘要	We report on the fabrication of three dimensional (3D) microstructures in glass with isotropic spatial resolutions. To achieve high throughput fabrication, we expand the focal spot size with a low-numerical-aperture lens, which naturally results in a degraded axial resolution. We solve the problem with simultaneous spatial temporal focusing which leads to an isotropic laser-affected volume with a spatial resolution of similar to 100 mu m. (C) 2016 Optical Society of America
收录类别	SCI
资助信息	National Basic Research Program of China [2014CB921300]; National Natural Science Foundation of China [61327902, 11104294, 61275205, 61405220, 61221064, 11304330]; Youth Innovation Promotion Association of Chinese Academy of Sciences
WOS记录号	WOS:000390408500011
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/27652]
专题	上海光学精密机械研究所_强场激光物理国家重点实验室
作者单位	中国科学院上海光学精密机械研究所
推荐引用方式 GB/T 7714	Qiao, Lingling,Tan, Yuanxin,Wang, Zhaohui,et al. High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions[J]. Opt. Mater. Express,2016,6(12):3787.
APA	Qiao, Lingling,Tan, Yuanxin,Wang, Zhaohui,Chu, Wei,Liao, Yang,&Cheng, Ya.(2016).High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions.Opt. Mater. Express,6(12),3787.
MLA	Qiao, Lingling,et al."High-throughput in-volume processing in glass with isotropic spatial resolutions in three dimensions".Opt. Mater. Express 6.12(2016):3787.