Ternary BCN thin films deposited by reactive sputtering

	Ternary BCN thin films deposited by reactive sputtering
	Yue, JS; Cheng, WJ; Zhang, XW; He, DY; Chen, GH
	2000-10-31
会议名称	International-Union-of-Materials-Research-Societies International Conference on Advanced Materials (IUMRS-ICAM 99)
会议日期	JUN 13-18, 1999
会议地点	BEIJING, PEOPLES R CHINA
关键词	boron carbonitride sputtering Fourier transform infrared X-ray photoelectron spectroscopy
期号	1-2
页码	247-250
通讯作者	He, DY (reprint author), Lanzhou Univ, Dept Phys, Lanzhou 730000, Peoples R China.
会议录	THIN SOLID FILMS
会议录出版地	LAUSANNE
学科主题	Materials Science; Physics
语种	英语
ISSN号	0040-6090
WOS记录号	WOS:000165067400056
内容类型	会议论文
源URL	[http://ir.lzu.edu.cn/handle/262010/113317]
专题	物理科学与技术学院_会议论文
推荐引用方式 GB/T 7714	Yue, JS,Cheng, WJ,Zhang, XW,et al. Ternary BCN thin films deposited by reactive sputtering[C]. 见:International-Union-of-Materials-Research-Societies International Conference on Advanced Materials (IUMRS-ICAM 99). BEIJING, PEOPLES R CHINA. JUN 13-18, 1999.