Variations in Si-H bonding modes and a-Si:H growth by hot filament assisted microwave electron synchrotron resonance chemical vapor deposition | |
Zhang, Wenli; Chen, Guanghua; He, Bin; Zhu, Xiuhong; Ma, Zhanjie; Ding, Yi; Liu, Guohan; Gao, Zhihua; Song, Xuemei | |
刊名 | Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology |
2006-09 | |
卷号 | 26期号:SUPPL.页码:67-70 |
关键词 | a-Si:H films Bonding mode Hot filament assistance |
ISSN号 | 16727126 |
通讯作者 | Zhang, W. |
学科主题 | Solar Cells;Inorganic Compounds;Coating Techniques; |
语种 | 中文 |
内容类型 | 期刊论文 |
源URL | [http://ir.lzu.edu.cn/handle/262010/178068] |
专题 | 物理科学与技术学院_期刊论文 |
推荐引用方式 GB/T 7714 | Zhang, Wenli,Chen, Guanghua,He, Bin,et al. Variations in Si-H bonding modes and a-Si:H growth by hot filament assisted microwave electron synchrotron resonance chemical vapor deposition[J]. Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,2006,26(SUPPL.):67-70. |
APA | Zhang, Wenli.,Chen, Guanghua.,He, Bin.,Zhu, Xiuhong.,Ma, Zhanjie.,...&Song, Xuemei.(2006).Variations in Si-H bonding modes and a-Si:H growth by hot filament assisted microwave electron synchrotron resonance chemical vapor deposition.Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,26(SUPPL.),67-70. |
MLA | Zhang, Wenli,et al."Variations in Si-H bonding modes and a-Si:H growth by hot filament assisted microwave electron synchrotron resonance chemical vapor deposition".Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology 26.SUPPL.(2006):67-70. |
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