Preparation of hydrogenated micro crystalline silicon films with hot-wire-assisted MWECR-CVD system

	Preparation of hydrogenated micro crystalline silicon films with hot-wire-assisted MWECR-CVD system
	He, B; Chen, GH; Zhu, XH; Zhang, WL; Ding, Y; Ma, ZJ; Gao, ZH; Song, XM; Deng, JX
刊名	CHINESE PHYSICS
	2006-04
卷号	15 期号:4 页码:866-871
关键词	HW-MWECR-CVD mu c-Si : H hydrogen dilution heterogeneous solid-state phase transition
ISSN号	1009-1963
通讯作者	He, B (reprint author), Beijing Univ Technol, Coll Mat Sci & Engn, Beijing 100022, Peoples R China.
学科主题	Physics
语种	英语
WOS记录号	WOS:000236720900035
内容类型	期刊论文
源URL	[http://202.201.7.4/handle/262010/104048]
专题	物理科学与技术学院_期刊论文
推荐引用方式 GB/T 7714	He, B,Chen, GH,Zhu, XH,et al. Preparation of hydrogenated micro crystalline silicon films with hot-wire-assisted MWECR-CVD system[J]. CHINESE PHYSICS,2006,15(4):866-871.
APA	He, B.,Chen, GH.,Zhu, XH.,Zhang, WL.,Ding, Y.,...&Deng, JX.(2006).Preparation of hydrogenated micro crystalline silicon films with hot-wire-assisted MWECR-CVD system.CHINESE PHYSICS,15(4),866-871.
MLA	He, B,et al."Preparation of hydrogenated micro crystalline silicon films with hot-wire-assisted MWECR-CVD system".CHINESE PHYSICS 15.4(2006):866-871.