Experimental study on atomic-scale strengthening mechanism of the IVB transition-metal nitrides

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	Experimental study on atomic-scale strengthening mechanism of the IVB transition-metal nitrides
	Han, Kechang ; Lin, Guoqiang ; Dong, Chuang ; Tai, Kaiping ; Jiang, Xin
刊名	JOURNAL OF ALLOYS AND COMPOUNDS
	2017-03-05
卷号	696 页码:572-579
关键词	Nitride films Arc ion plating Composition Hardness Strengthening mechanism
ISSN号	0925-8388
通讯作者	Lin, GQ (reprint author), Dalian Univ Technol, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China.
中文摘要	For deeply understanding on the atomic-scale strengthening mechanism of the IVB transition-metal nitrides, three groups of the IVB transition-metal nitrides TMN (TiN, ZrN, and HfN) films with different nitrogen contents were synthesized on the Si (100) substrates by enhanced magnetic filtering arc ion plating. The morphologies, microstructures, compositions, chemical states, residual stress, hardness and elastic modulus of as-deposited films were characterized by field emission scanning electron microscope, X-ray diffraction, X-ray photoelectron spectrometry, and Nanoindenter measurements. The results showed that TMNx films exhibited B1-NaCl single-phase structure within the large composition ranges. The preferred orientation, thickness, grain size and residual stress of the TMNx films were kept constant at different nitrogen contents. Both nanohardness and elastic modulus first increased and then decreased with the increase of nitrogen content, reaching the peak at x around 0.82. The composition dependent hardness enhancement may be attributed to different atomic-scale chemical bonding states and electronic structures in this work, rather than conventional meso-scale factors, such as preferred orientation, grain size and residual stress. (C) 2016 Elsevier B.V. All rights reserved.
学科主题	Chemistry, Physical ; Materials Science, Multidisciplinary ; Metallurgy & Metallurgical Engineering
收录类别	SCI
资助信息	National Natural Science Foundation of China [51271047]
语种	英语
公开日期	2017-08-17
内容类型	期刊论文
源URL	[http://ir.imr.ac.cn/handle/321006/78239]
专题	金属研究所_中国科学院金属研究所
推荐引用方式 GB/T 7714	Han, Kechang,Lin, Guoqiang,Dong, Chuang,et al. Experimental study on atomic-scale strengthening mechanism of the IVB transition-metal nitrides[J]. JOURNAL OF ALLOYS AND COMPOUNDS,2017,696:572-579.
APA	Han, Kechang,Lin, Guoqiang,Dong, Chuang,Tai, Kaiping,&Jiang, Xin.(2017).Experimental study on atomic-scale strengthening mechanism of the IVB transition-metal nitrides.JOURNAL OF ALLOYS AND COMPOUNDS,696,572-579.
MLA	Han, Kechang,et al."Experimental study on atomic-scale strengthening mechanism of the IVB transition-metal nitrides".JOURNAL OF ALLOYS AND COMPOUNDS 696(2017):572-579.