| 题名 | 硅微压电传声器与硅微压电超声换能器的研究 |
| 作者 | 郝震宏 |
| 学位类别 | 博士 |
| 答辩日期 | 2008-05-30 |
| 授予单位 | 中国科学院声学研究所 |
| 授予地点 | 声学研究所 |
| 关键词 | 硅微压电传声器 硅微压电超声换能器 三维超声成像 牺牲层释放 |
| 学位专业 | 声学 |
| 中文摘要 | 硅微压电换能器及换能器阵列具有体积小、重量轻、性能一致性好及易于大批量制造等优点，具有广阔的应用前景，而工作频率较高的MHz级硅微压电超声换能器及阵列已经成为超声三维成像方面的研究热点。本文开展了硅微压电传声器、百KHz和MHz级硅微压电超声换能器的理论和实验研究。 本文推导了硅微压电传声器的接收响应，根据分析结果进行了硅微压电传声器的优化设计。设计并制备了方形振动膜、圆形振动膜及基于聚酰亚胺振动膜的硅微压电传声器芯片。优化设计后的硅微压电传声器在1 KHz的接收灵敏度达到 -59 dB （ref 1V/Pa）。在此基础上研制了硅微压电水听器并进行了初步测量。 本文推导了方形多层复合振动膜的谐振频率，分析了薄膜残余应力对换能器谐振频率及振幅分布的影响。设计并制作了中心频率为40 KHz～200 KHz的低频硅微压电超声换能器，测得换能器的谐振频率与理论分析较为符合。测量了换能器的导纳频响曲线，并拟合得到71 KHz换能器的等效电路，换能器机械品质因数Qm约为171。对换能器进行了超声信号的收发实验，测得谐振频率为71 KHz的硅微压电超声换能器的接收灵敏度约为-201.6 dB（ref 1V/μPa），发射电压响应约为137dB（ref 1 μPa•m/V）。 本文设计了一种新型的基于牺牲层工艺的多单元并联式高频硅微压电超声换能器。推导了圆形振动膜换能器的谐振频率，计算了薄膜残余应力对谐振频率的影响。推导了换能器的受迫振动位移、机械耦合能及等效电路。计算了换能器的发射声场。制备了谐振频率为1MHz的硅微压电超声换能器并研究了牺牲层释放工艺在换能器制备中的应用。测量了换能器的导纳频响曲线，测得换能器的谐振频率为1.14MHz，与理论分析结果基本一致。拟合得到换能器的等效电路，测得换能器机械品质因数Qm约为343。初步进行了换能器的收发实验，测量得到换能器的在1MHz的接收灵敏度约为-255 dB（ref 1V/μPa），发射电压响应为131.2 dB（1 μPa•m/V），-3 dB带宽约为68％。 |
| 英文摘要 | The micro-machined piezoelectric transducers have potential application due to its advantages of small size, low cost, batch fabrication and possibility of integrating with the circuits. Based on the analysis of relational research status in the world at present, the piezoelectric micro-machined microphones and the piezoelectric micro-machined transducers with the resonant frequency of 100 KHz and 1 MHz are studied theoretically and experimentally in this thesis. The receiving response of the piezoelectric micro-machined microphone is analyzed detailed. The piezoelectric micro-machined microphones with rectangle and circular diaphragm, and the ones with the Polyimide diaphragm are fabricated. The sensitivity and the noise level of the microphones are measured experimentally and the best results of the sensitivity is abut 59 dB (ref 1V/Pa). The resonant frequency of the piezoelectric micro-machined ultrasonic transducer is calculated and the effect of the residual stress within the diaphragm is also analyzed by FEM method. The piezoelectric micro-machined ultrasonic transducers with the resonant frequency between 40 KHz and 200 KHz are fabricated. The admittance frequency response of the transducers of 71 KHz is measured and the Qm is about 171. The measured receiving sensitivity is -201.6 dB (ref 1V/μPa) and the emission voltage response is about 137 dB (ref 1 μPa•m/V). The resonant frequency and the forced vibration displacement of the piezoelectric micro-machined ultrasonic transducer with circular diaphragm are analyzed. Special process of sacrificial layer releasing is employed in the development of the PMUT samples. The measured resonant frequency of the fabricated samples is about 1.14MHz, which is in good agreement with design and theoretical prediction. The admittance frequency response of the transducers is measured and the Qm of the transducers is about 343.The measured receiving sensitivity is -255 dB (ref 1V/μPa) and the emission voltage response is about 131dB (ref 1 μPa•m/V). The -3dB bandwidth of the transducer is about 68%. |
| 语种 | 中文 |
| 公开日期 | 2011-05-07 |
| 页码 | 120 |
| 内容类型 | 学位论文 |
| 源URL | [http://159.226.59.140/handle/311008/304]  |
| 专题 | 声学研究所_声学所博硕士学位论文_1981-2009博硕士学位论文 |
| 推荐引用方式 GB/T 7714 | 郝震宏. 硅微压电传声器与硅微压电超声换能器的研究[D]. 声学研究所. 中国科学院声学研究所. 2008. |
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