| 磨削阶段大口径非球面拼接测量技术; Stitching Measurement Technique for Large-aperture Aspheric Surface during Grinding Process | |
| 张东旭 ; 杨平 ; 毕果 ; 杨旭 ; 叶世蔚 ; 郭隐彪 | |
| 2014-11-13 | |
| 关键词 | 大口径非球面 拼接测量 冗余数据剔除 综合优化处理 large-aperture aspheric surface stitching measurement rejecting redundant data comprehensive optimization processing |
| 英文摘要 | 为实现对磨削加工阶段大口径非球面光学元件的精密测量,提出一种基于坐标测量的多段拼接综合优化数据处理模型。基于多体系统理论、最小二乘原理建立两段面形轮廓拼接数学模型;提出基于曲率原理和非球面方程最小二乘拟合的冗余数据剔除数学模型;建立多段拼接的综合优化处理模型;利用TAylOr HObSOn轮廓仪对口径为176 MM的非轴对称非球面光学元件的3条母线进行分段测量试验并通过文中提出的数学模型进行数据拼接处理,试验结果表明,拼接测量结果与单次测量结果相比,误差最大值的平均值为0.25μM,最小值的平均值为–0.22μM,比该光学元件的面形峰-谷值2.77μM高出一个数量级,达到检测要求。试验结果证明所提多段拼接综合优化数据处理模型的正确性及有效性,该模型可以进行工程应用。; In order to test large-aperture aspheric surface optice element accurately during grinding process, a comprehensive optimization data processing model of stitching measurement is proposed based on coordinate measuring.Firstly, the stitching model for two segments of surface shape contour is built based on multi-body system theory and least square principle; secondly, the rejecting redundant data model is built based on curvature principle and least square fitting of aspheric equation; then the comprehensive optimization processing model for multiple segments stitching is built; three generatrices of a non-axisymmetry aspherical optical element whose aperture is 176 mm is stitching measured by Taylor Hobson profilometer and the data is processed by the model mentioned in the text.The results show that the maximum average error of the stitching measurement is 0.25 μm, and the minimum average error of the stitching measurement is –0.22 μm which is compared with the single measurement.The error is an order of magnitude higher than the surface shape peak–valley value 2.77 μm of the optic element, and matches the measurement requirements.The experimental results prove the correctness and effectiveness of the comprehensive optimization data processing model of stitching measurement, and the model can be applied in engineering.; 国家自然科学基金资助项目(51075343;51275433) |
| 语种 | zh_CN |
| 内容类型 | 期刊论文 |
| 源URL | [http://dspace.xmu.edu.cn/handle/2288/105942]  |
| 专题 | 航空航天－已发表论文 |
| 推荐引用方式 GB/T 7714 | 张东旭,杨平,毕果,等. 磨削阶段大口径非球面拼接测量技术, Stitching Measurement Technique for Large-aperture Aspheric Surface during Grinding Process[J],2014. |
| APA | 张东旭,杨平,毕果,杨旭,叶世蔚,&郭隐彪.(2014).磨削阶段大口径非球面拼接测量技术.. |
| MLA | 张东旭,et al."磨削阶段大口径非球面拼接测量技术".(2014). |
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