镍表面三维微图形的复制加工

CORC > 厦门大学 > 2004年第10卷

	镍表面三维微图形的复制加工; Chemical Microetching of Three-dimensional Gear-like Pattern on Nickel Surface
	LIU Zhu-fang ; Jiang Li-min
刊名	http://electrochem.xmu.edu.cn/CN/abstract/abstract8990.shtml
	2004-08-28
关键词	约束刻蚀剂层技术镍三维微加工化学刻蚀电化学 Confined etchant layer technique (CELT) Nickel 3D-microfabrication Chemical etching Electrochemistry
英文摘要	运用约束刻蚀剂层技术(CELT)在金属镍(Ni)表面实现三维微图形加工,以规整的三维齿状微结构作模板,获得可有效CELT加工的化学刻蚀和捕捉体系,在Ni表面得到了与齿状结构互补的三维微结构并应用扫描电子显微镜(SEM)和原子力显微镜(AFM)表征刻蚀图案,证实CELT可用于金属表面Ni的三维微图形刻蚀加工.; The chemical micromachining on nickel surface with three-dimensional (3D) gear-like mold was realized by confined etchant layer technique (CELT). By using effective chemical etching and scavenging system (HNO_(3) + NaOH) and optimizing experimental parameters, such as the etching time, etching current density, concentration of the etchant or and scavenger, we obtained the etched pattern, which is close to negative copy of the mold. The etched micro-pattern characterized by SEM and AFM, demonstrates that CELT can be applied to the 3-D microstructure replication on nickel surface .; Author's Address: 1, JIANG Li-ming~1, TANG Jing~1, ZHANG Li~1, TIAN Zhong-qun~*1, TIAN Zhao-wu~1, LIU Pin-kuan~2,SUN Li-ning~2 1.State Key Lab.for Phys.Chem.of Solid Surf.,Depart. of Chem., Xiamen Univ.,Xiamen 361005,China, 2.The Institute of Robots, Harbin Institute of Technology, Harbin 150001, China
语种	中文
出版者	厦门大学《电化学》编辑部
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/57805]
专题	2004年第10卷
推荐引用方式 GB/T 7714	LIU Zhu-fang,Jiang Li-min. 镍表面三维微图形的复制加工, Chemical Microetching of Three-dimensional Gear-like Pattern on Nickel Surface[J]. http://electrochem.xmu.edu.cn/CN/abstract/abstract8990.shtml,2004.
APA	LIU Zhu-fang,&Jiang Li-min.(2004).镍表面三维微图形的复制加工.http://electrochem.xmu.edu.cn/CN/abstract/abstract8990.shtml.
MLA	LIU Zhu-fang,et al."镍表面三维微图形的复制加工".http://electrochem.xmu.edu.cn/CN/abstract/abstract8990.shtml (2004).