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	Well aligned single-walled carbon nanotube (SWNT) film as a building block for MEMS/NEMS devices
	Wang, B. ; Rong, H. ; Lu, M. ; Lv M(吕苗)
	2012
关键词	Nanocantilevers Single-walled carbon nanotubes (SWCN)
英文摘要	Conference Name:China Semiconductor Technology International Conference 2012, CSTIC 2012. Conference Address: Shanghai, China. Time:March 18, 2012 - March 19, 2012.; SWNTs are among the strongest known fibers with low density, high thermal conductivity, high piezoresistivity, and can survive in 2-300掳C in oxygenic environment and 鈭?900掳C in vacuum. Some fundamental MEMS/NEMS components, especially beams and cantilevers, will have broad applications if they are made of aligned dense SWNTs. In this paper, a fabrication process of SWNT nanoscale beams and cantilevers are presented, and some application examples like microfluidic devices are introduced. 漏 The Electrochemical Society.
语种	英语
出处	http://dx.doi.org/10.1149/1.3694475
出版者	ELECTROCHEMICAL SOC INC
内容类型	其他
源URL	[http://dspace.xmu.edu.cn/handle/2288/86281]
专题	物理技术－会议论文
推荐引用方式 GB/T 7714	Wang, B.,Rong, H.,Lu, M.,et al. Well aligned single-walled carbon nanotube (SWNT) film as a building block for MEMS/NEMS devices. 2012-01-01.

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