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	Ni-electroplating of double-width micro-cantilever - art no 61090L
	Liu, Yifang ; Sun, Daoheng ; Wang, Mingliang ; Lv, WenLong ; Maher, MA ; Stewart, HD ; Chiao, JC ; Sun DH(孙道恒)
	2006
关键词	PULSE CURRENT NICKEL
英文摘要	Conference Name:Conference on Micromachining and Microfabrication Process Technology XI. Conference Address: San Jose, CA.; Micro-electroplating technology has an increasingly wider application in the fabrication of MEMS devices. In order to fabricate a double-width cantilever beam which has three different electroplated areas. The proper composition of the bath solution is obtained through experiments firstly in the paper. Then the effects of the peak of current density, duty cycle and pause time on the surface morphology of the electroplated nickel are studied experimentally to make sure the regulating range of pulsed parameters. And at last the double-width cantilever beam is fabricated using lithographic. micro-electroplating and sacrificial layer releasing processes. The results show that the surface of the beam is bright and smooth. and the nucleation rate increases steadily. But the thickness of the three parts with different width is different which can be modified by increasing the duty cycle and reducing the current density to some extent.
语种	英语
出处	http://dx.doi.org/10.1117/12.637455
出版者	SPIE-INT SOC OPTICAL ENGINEERING
内容类型	其他
源URL	[http://dspace.xmu.edu.cn/handle/2288/85930]
专题	物理技术－会议论文
推荐引用方式 GB/T 7714	Liu, Yifang,Sun, Daoheng,Wang, Mingliang,et al. Ni-electroplating of double-width micro-cantilever - art no 61090L. 2006-01-01.

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