Spatial frequency doubling with two-step technique

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	Spatial frequency doubling with two-step technique
	Li, Sensen ; Chen, Lujian ; Dong, Xiaopeng ; Ren, Xuechang ; Zhang, Xiangsu ; Liu, Shou ; Li SS(李森森) ; Chen LJ(陈鹭剑) ; Dong XP(董小鹏) ; Ren XC(任雪畅) ; Zhang XS(张向苏)
刊名	http://dx.doi.org/10.1364/OL.39.002024
	2014-04-01
关键词	LITHOGRAPHY FABRICATION GRATINGS MULTIPLICATION PATTERNS
英文摘要	985 Project of Xiamen University; Natural Science Foundation of Fujian Province, China [2012J01285]; The phenomenon of spatial frequency doubling generated by a two-step technique with the collimated beam at normal incidence in the second exposure is presented. Theoretical analysis demonstrates that the phenomenon is induced by the Talbot effect in photoresist and the superposition of two exposures, and the minimum achievable period of the grating with double spatial frequency can be close to one half of the exposure wavelength in vacuum, divided by the refractive index of photoresist lambda/2n. The two-step technique has the potential to be a simpler and more practical resolution-improving technique for the Talbot-effect-based approach of spatial frequency doubling. (C) 2014 Optical Society of America
语种	英语
出版者	OPTICAL SOC AMER
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/92704]
专题	信息技术－已发表论文
推荐引用方式 GB/T 7714	Li, Sensen,Chen, Lujian,Dong, Xiaopeng,et al. Spatial frequency doubling with two-step technique[J]. http://dx.doi.org/10.1364/OL.39.002024,2014.
APA	Li, Sensen.,Chen, Lujian.,Dong, Xiaopeng.,Ren, Xuechang.,Zhang, Xiangsu.,...&张向苏.(2014).Spatial frequency doubling with two-step technique.http://dx.doi.org/10.1364/OL.39.002024.
MLA	Li, Sensen,et al."Spatial frequency doubling with two-step technique".http://dx.doi.org/10.1364/OL.39.002024 (2014).