Highly efficient deterministic polishing using a semirigid bonnet

CORC > 厦门大学 > 物理技术－已发表论文

	Highly efficient deterministic polishing using a semirigid bonnet
	Wang, Chunj ; Yang, Wei ; Wang, Zhenzhong ; Yang, ; Sun, Zhij ; Zhong, Bo ; Pan, Ri ; Yang, Ping ; Guo, Yinbiao ; Xu, Qiao ; Yang W(杨炜) ; Wang ZZ(王振忠) ; Yang P(杨平) ; Guo YB(郭隐彪)
刊名	http://dx.doi.org/10.1117/1.OE.53.9.095102
	2014
关键词	Finite element method Sheet metal Stainless steel
英文摘要	This paper presents a semirigid (SR) bonnet tool which has the advantages of high efficiency and determinacy for material removal on optical elements and also has the potential to be used on aspheric optics. It consists of three layers: a metal sheet, a rubber membrane, and a polishing pad, from inside to outside. It inherits the flexibility of a normal bonnet but has a higher stiffness. Finite element analysis was performed to determine that the stainless steel is the best-suited material for use as the metal sheet. An SR bonnet with a stainless-steel metal sheet was fabricated and tested. Its tool influence function (TIF) is Gaussian-like, and the TIF stability is more than 90%. The peak-to-valley of its uniform removal area is less than 0.1λ. Tool ripples are highly depressed and the surface profile is well preserved in the prepolishing test. In 12 min, ～36 mm3 of material is removed.
语种	英语
出版者	SPIE
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/92289]
专题	物理技术－已发表论文
推荐引用方式 GB/T 7714	Wang, Chunj,Yang, Wei,Wang, Zhenzhong,et al. Highly efficient deterministic polishing using a semirigid bonnet[J]. http://dx.doi.org/10.1117/1.OE.53.9.095102,2014.
APA	Wang, Chunj.,Yang, Wei.,Wang, Zhenzhong.,Yang,.,Sun, Zhij.,...&郭隐彪.(2014).Highly efficient deterministic polishing using a semirigid bonnet.http://dx.doi.org/10.1117/1.OE.53.9.095102.
MLA	Wang, Chunj,et al."Highly efficient deterministic polishing using a semirigid bonnet".http://dx.doi.org/10.1117/1.OE.53.9.095102 (2014).