Piezoresistive pressure sensors for harsh environments

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	Piezoresistive pressure sensors for harsh environments
	San, Hai-Sheng ; Song, Zi-Jun ; Wang, Xiang ; Zhao, Yan-Li ; Yu, Yu-Xi ; San HS(伞海生) ; Yu YX(余煜玺)
刊名	http://dx.doi.org/10.3788/OPE.20122003.0550
	2012
关键词	Diaphragms Finite element method Glass bonding Industrial applications MEMS Reliability Stress concentration
英文摘要	To increase the stabilization and reliability of piezoresistive pressure sensors working in harsh environments with harsh acids, alkalis, corrosive salts, and other destructive substances such as electrostatic particles and damp, a novel piezoresistive pressure sensor was presented. The innovation of the sensor was that the sensing elements of the sensor were fabricated in the lower surface of a silicon diaphragm and were sealed in a vacuum pressure cavity by silicon-glass bonding process. The work principle of this pressure sensor was introduced. Then, Finite Element Method and ANSYS soft were used to simulate the stress distribution of the diaphragm. Finally, the micro-electro-mechanical System (MEMS) technology was used to fabricate a pressure sensor with the dimension of 1.5 mm脳1.5 mm脳500 渭m. The measurement results by a pressure test platform show that the sensitivity of the sensor is about 20 mV/V-MPa, and its maximum nonlinearity is 2.73% FSS, which meets the requirements of the modern industrial applications.
语种	英语
出版者	Chinese Academy of Sciences
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/92122]
专题	物理技术－已发表论文
推荐引用方式 GB/T 7714	San, Hai-Sheng,Song, Zi-Jun,Wang, Xiang,et al. Piezoresistive pressure sensors for harsh environments[J]. http://dx.doi.org/10.3788/OPE.20122003.0550,2012.
APA	San, Hai-Sheng.,Song, Zi-Jun.,Wang, Xiang.,Zhao, Yan-Li.,Yu, Yu-Xi.,...&余煜玺.(2012).Piezoresistive pressure sensors for harsh environments.http://dx.doi.org/10.3788/OPE.20122003.0550.
MLA	San, Hai-Sheng,et al."Piezoresistive pressure sensors for harsh environments".http://dx.doi.org/10.3788/OPE.20122003.0550 (2012).