Effect of excimer laser annealing on the silicon nanocrystals embedded in silicon-rich silicon nitride film

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	Effect of excimer laser annealing on the silicon nanocrystals embedded in silicon-rich silicon nitride film
	Chen, Rui ; Qi, D. F. ; Ruan, Y. J. ; Pan, S. W. ; Chen, S. Y. ; Xie, Sheng ; Li, Cheng ; Lai, H. K. ; Sun, H. D. ; Li C(李成)
刊名	http://dx.doi.org/10.1007/s00339-011-6592-9
	2012-01
关键词	CHEMICAL-VAPOR-DEPOSITION AMORPHOUS-SILICON QUANTUM DOTS SI NANOCRYSTALS LIGHT-EMISSION THIN-FILMS PHOTOLUMINESCENCE CONFINEMENT LUMINESCENCE EFFICIENCY
英文摘要	Nation Natural Science Foundation of China (NSFC) [50672079, 60837001, 61036002]; National Basic Research Program of China (973 Program) [2007CB613404]; Natural Science Foundation of Fujian Province [2008J0221]; Singapore Ministry of Education [RG63/10]; The investigations of silicon-rich silicon nitride film grown by plasma-enhanced chemical vapor deposition and then annealed by excimer laser have been carried out systematically. The surface roughness and the crystallization of the films have significantly been improved after the excimer laser annealing. The samples demonstrate visible photoluminescence emission under optical excitation at room temperature. It is found that the emission peak energy as well as emission intensity changes with laser annealing conditions, and the relevant mechanism is discussed in detail. Our investigation exhibits the size controllability of silicon nanocrystals embedded in the silicon nitride film, which implies promising applications in optoelectronic devices such as light-emitting diodes and solar cells.
语种	英语
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/69494]
专题	物理技术－已发表论文
推荐引用方式 GB/T 7714	Chen, Rui,Qi, D. F.,Ruan, Y. J.,et al. Effect of excimer laser annealing on the silicon nanocrystals embedded in silicon-rich silicon nitride film[J]. http://dx.doi.org/10.1007/s00339-011-6592-9,2012.
APA	Chen, Rui.,Qi, D. F..,Ruan, Y. J..,Pan, S. W..,Chen, S. Y..,...&李成.(2012).Effect of excimer laser annealing on the silicon nanocrystals embedded in silicon-rich silicon nitride film.http://dx.doi.org/10.1007/s00339-011-6592-9.
MLA	Chen, Rui,et al."Effect of excimer laser annealing on the silicon nanocrystals embedded in silicon-rich silicon nitride film".http://dx.doi.org/10.1007/s00339-011-6592-9 (2012).