Kinetic Monte Carlo simulations of Au clusters on Si(111)-7 x 7 surface

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	Kinetic Monte Carlo simulations of Au clusters on Si(111)-7 x 7 surface
	Chen, G. ; Zhou, Y. H. ; Li, S. P. ; Kang, J. Y. ; Kang JY(康俊勇)
刊名	http://dx.doi.org/10.1007/s11051-008-9478-9
	2009-05
关键词	MN NANODOTS AG DIFFUSION ATOMS ADSORPTION GROWTH
英文摘要	National High Technology Research and Development Program [2006AA03A110]; National Natural Science Foundation of China [60776066, 20603028]; Self-assembled growth of Au nanoclusters on the Si(111)-7 x 7 surface has been studied using kinetic Monte Carlo simulations. A model considering various atomic processes of deposition, adsorption, diffusion, nucleation, and aggregation is introduced, and the main energetic parameters are optimized based on the experimental results. The evolution of surface morphology during Au growth is simulated in real time, from which the atomic behaviors of Au could be really captured. Most of Au atoms diffuse on the substrate in the very early stage of growth, and Au clusters nucleate and grow with the increasing coverage. The competition among various atomic processes results in the distinct distribution of Au clusters under different coverages. The growth conditions are further optimized, showing that the higher uniformity of Au clusters would be obtained at a low deposition rate and an optimal substrate temperature of about 380 K.
语种	英语
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/69132]
专题	物理技术－已发表论文
推荐引用方式 GB/T 7714	Chen, G.,Zhou, Y. H.,Li, S. P.,et al. Kinetic Monte Carlo simulations of Au clusters on Si(111)-7 x 7 surface[J]. http://dx.doi.org/10.1007/s11051-008-9478-9,2009.
APA	Chen, G.,Zhou, Y. H.,Li, S. P.,Kang, J. Y.,&康俊勇.(2009).Kinetic Monte Carlo simulations of Au clusters on Si(111)-7 x 7 surface.http://dx.doi.org/10.1007/s11051-008-9478-9.
MLA	Chen, G.,et al."Kinetic Monte Carlo simulations of Au clusters on Si(111)-7 x 7 surface".http://dx.doi.org/10.1007/s11051-008-9478-9 (2009).