Design and Experiment of a Jetting Dispenser Driven by Piezostack Actuator | |
Wang, Lingyun ; Du, Jiang ; Luo, Zhiwei ; Du, Xiaohui ; Li, Yipan ; Liu, Juan ; Sun, Daoheng ; Sun DH(孙道恒) | |
刊名 | http://dx.doi.org/10.1109/TCPMT.2012.2222407
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2013-01 | |
关键词 | Displacement amplifier jetting microelectronic packaging piezostack actuator |
英文摘要 | To make up for the insufficiency and instability of contact dispensers that are used for fluid dispensing in microelectronic packaging, a noncontact jetting dispenser driven by a piezostack actuator is introduced in this paper. After describing the structural components and operating principle of the dispensing mechanism, a fluid model is presented to discuss the dynamic properties of the fluid and analyze the key parameters of the proposed dispenser. The ANSYS simulation software is used to design the displacement amplifier, which is an important component of the dispenser. The maximum displacement output of 323 mu m is obtained by optimizing. Subsequently, the dynamic behavior of the displacement amplifier is measured by an optical displacement sensor. The displacement change with the driving voltage amplitude and frequency is also investigated; the maximum displacement is 320 mu m, and the error between the simulation and the measurement result is just 0.75%. In order to verify the practicality of dispenser, experiments are conducted to examine the effects of the driving voltage, backpressure, working temperature, and distance between the nozzle and the collector on the jetting performance and droplet diameter. The dispenser can dispense droplets uniformly and steadily. Its maximum jetting frequency is 65 Hz, and droplets of 1.07-mm diameter are produced by a stainless steel nozzle of 0.25-mm diameter in the experimental study, with the variation of the droplet diameter being within +/- 2%. |
语种 | 英语 |
内容类型 | 期刊论文 |
源URL | [http://dspace.xmu.edu.cn/handle/2288/68962] ![]() |
专题 | 物理技术-已发表论文 |
推荐引用方式 GB/T 7714 | Wang, Lingyun,Du, Jiang,Luo, Zhiwei,et al. Design and Experiment of a Jetting Dispenser Driven by Piezostack Actuator[J]. http://dx.doi.org/10.1109/TCPMT.2012.2222407,2013. |
APA | Wang, Lingyun.,Du, Jiang.,Luo, Zhiwei.,Du, Xiaohui.,Li, Yipan.,...&孙道恒.(2013).Design and Experiment of a Jetting Dispenser Driven by Piezostack Actuator.http://dx.doi.org/10.1109/TCPMT.2012.2222407. |
MLA | Wang, Lingyun,et al."Design and Experiment of a Jetting Dispenser Driven by Piezostack Actuator".http://dx.doi.org/10.1109/TCPMT.2012.2222407 (2013). |
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