A leveling method based on current feedback mode of scanning electrochemical microscopy

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	A leveling method based on current feedback mode of scanning electrochemical microscopy
	Han, Lianhuan ; Yuan, Ye ; Zhang, Jie ; Zhao, Xuesen ; Cao, Yongzhi ; Hu, Zhenjiang ; Yan, Yongda ; Dong, Shen ; Tian, Zhong-Qun ; Tian, Zhao-Wu ; Zhan, Dongping ; Tian ZQ(田中群) ; Tian ZW(田昭武)
刊名	http://dx.doi.org/10.1021/ac303122v
	2013-02-05
关键词	Electrochemical cutting Electrolytic cells Scanning electron microscopy Scanning probe microscopy
英文摘要	Substrate leveling is an essential but neglected instrumental technique of scanning electrochemical microscopy (SECM). In this technical note, we provide an effective substrate leveling method based on the current feedback mode of SECM. By using an air-bearing rotary stage as the supporter of an electrolytic cell, the current feedback presents a periodic waveform signal, which can be used to characterize the levelness of the substrate. Tuning the adjusting screws of the tilt stage, substrate leveling can be completed in minutes by observing the decreased current amplitude. The obtained high-quality SECM feedback curves and images prove that this leveling technique is valuable in not only SECM studies but also electrochemical machining. ? 2013 American Chemical Society.
语种	英语
出版者	American Chemical Society
内容类型	期刊论文
源URL	[http://dspace.xmu.edu.cn/handle/2288/89114]
专题	化学化工－已发表论文
推荐引用方式 GB/T 7714	Han, Lianhuan,Yuan, Ye,Zhang, Jie,et al. A leveling method based on current feedback mode of scanning electrochemical microscopy[J]. http://dx.doi.org/10.1021/ac303122v,2013.
APA	Han, Lianhuan.,Yuan, Ye.,Zhang, Jie.,Zhao, Xuesen.,Cao, Yongzhi.,...&田昭武.(2013).A leveling method based on current feedback mode of scanning electrochemical microscopy.http://dx.doi.org/10.1021/ac303122v.
MLA	Han, Lianhuan,et al."A leveling method based on current feedback mode of scanning electrochemical microscopy".http://dx.doi.org/10.1021/ac303122v (2013).