基于叉指结构的平面分形电容研究 | |
徐文彬 ; 庄铭杰 ; 王德苗 | |
刊名 | http://epub.edu.cnki.net/grid2008/brief/detailj.aspx?filename=jmxz201005015&dbcode=CJFQ&dbname=CJFQ2010
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2012-06-05 ; 2012-06-05 | |
关键词 | 集成薄膜电容 叉指电极 分形 integrated thin film capacitors interdigital capacitors fractal TN603.5 |
其他题名 | Fractal Planar Capacitors Based on Interdigital Structures |
中文摘要 | 以基于叉指结构的平面分形电容为研究对象,电容由激光刻蚀法制得,在测得其S参数后,利用ADS仿真工具进行了一阶等效电路参数提取及分析.结果表明,随着共面叉指电极间距的相对减小,电极间的耦合增大,相应的寄生电感也增大;而分形设计可以在保证电极间距不变的情况下,改善电容的工作稳定性.最后制得的分形平面电容的电容值在1~7 pF之间,电容稳定工作频率可达2.5 GHz以上,显示了较好的可调性和稳定性.; This paper studied the fractal planar capacitors based on interdigital structures.The capacitors were made by laser techniques.After the S parameters measurement,ADS simulation was adopted to analyze the corresponding first-order equivalent circuit parameters.It was showed that with the relative decrease of the gap between coplanar electrodes,the coupling between electrodes was enhanced,and a larger parasitical inductance parameter was expected.On the other hand,fractal design was found beneficial for the improvement of the capacitors stability.The capacitance value of the final fractal structure planar capacitor was between 1~7 pF and its stable operating frequency could be lager than 2.5 GHz,suggesting its good adjustability and stability.; 【作者单位】集美大学信息工程学院; 浙江大学信息与电子工程系;【作者英文名】XU Wen-bin1,ZHUANG Ming-jie1,WANG De-miao2(1.School of Information Engineering,Jimei University,Xiamen 361021,China;2.Department of Information Science & Electronics Engineering,Zhejiang University,Hangzhou 310027,China) |
语种 | 中文 |
内容类型 | 期刊论文 |
源URL | [http://ir.calis.edu.cn/hdl/235041/19982] ![]() |
专题 | 集美大学 |
推荐引用方式 GB/T 7714 | 徐文彬,庄铭杰,王德苗. 基于叉指结构的平面分形电容研究[J]. http://epub.edu.cnki.net/grid2008/brief/detailj.aspx?filename=jmxz201005015&dbcode=CJFQ&dbname=CJFQ2010,2012, 2012. |
APA | 徐文彬,庄铭杰,&王德苗.(2012).基于叉指结构的平面分形电容研究.http://epub.edu.cnki.net/grid2008/brief/detailj.aspx?filename=jmxz201005015&dbcode=CJFQ&dbname=CJFQ2010. |
MLA | 徐文彬,et al."基于叉指结构的平面分形电容研究".http://epub.edu.cnki.net/grid2008/brief/detailj.aspx?filename=jmxz201005015&dbcode=CJFQ&dbname=CJFQ2010 (2012). |
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