Thermal-mechanical modeling of nodular defect embedded within multilayer coatings

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Thermal-mechanical modeling of nodular defect embedded within multilayer coatings
	Ling Xiulan ; Shao JD(邵建达) ; Fan ZX(范正修)
刊名	j. vac. sci. technol. a
	2009
卷号	27 期号:2 页码:183
关键词	dielectric thin films evaporation high-temperature effects laser beam effects optical multilayers thermal stresses thermomechanical treatment
ISSN号	0734-2101
中文摘要	the initiation of laser damage within optical coatings can be better understood by thermal-mechanical modeling of coating defects. the result of this modeling shows that a high-temperature rise and thermal stress can be seen just inside the nodular defect compared to surrounding coating layers. the temperature rise and thermal stress tend to increase with seed diameter. shallower seed tend to cause higher temperature rise and greater thermal stress. there is a critical seed depth at which thermal stress is largest. the composition of the seed resulting from different coating-material emission during evaporation can affect the temperature rise and thermal stress distribution.
学科主题	光学薄膜
语种	英语
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4786]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Ling Xiulan,Shao JD,Fan ZX. Thermal-mechanical modeling of nodular defect embedded within multilayer coatings[J]. j. vac. sci. technol. a,2009,27(2):183, 186.
APA	Ling Xiulan,邵建达,&范正修.(2009).Thermal-mechanical modeling of nodular defect embedded within multilayer coatings.j. vac. sci. technol. a,27(2),183.
MLA	Ling Xiulan,et al."Thermal-mechanical modeling of nodular defect embedded within multilayer coatings".j. vac. sci. technol. a 27.2(2009):183.