Optical properties and microstructure of Ta2O5 biaxial film

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Optical properties and microstructure of Ta2O5 biaxial film
	Qi HJ(齐红基) ; Xiao Xiudi ; He HB(贺洪波) ; Yi Kui ; Fan ZX(范正修)
刊名	appl. optics
	2009
卷号	48 期号:1 页码:127
关键词	SCULPTURED THIN-FILMS PRINCIPAL REFRACTIVE-INDEXES SPECTROSCOPIC ELLIPSOMETRY CONSTANT DETERMINATION OBLIQUE DEPOSITION TANTALUM OXIDE PRISM COUPLER MATRIX ANGLE PARAMETERS
ISSN号	0003-6935
中文摘要	this study investigates the optical properties and microstructure of ta2o5 film deposited with the glancing angle deposition technique. the tilted nanocolumn microstructure, examined with scanning electron microscopy, induces the optical anisotropy of thin film. the optical properties of thin film are characterized with an inverse synthesis method. based on the cauchy model, the dispersion equations of optical constants of film are determined from the transmittance spectra measured at normal and oblique incidence over 400-800 nm. the starting values derived with an envelope method quicken the optimization process greatly. the dispersion of the principal indices n-1, n-2, and n-3 and the thickness d of thin film are presented statistically. a good agreement between the measured optical properties and theoretical calculation is obtained, which validates the model established for thin film produced by glancing angle deposition. (c) 2008 optical society of america
学科主题	光学薄膜
资助信息	shanghai rising-star program [07qb14006]; national natural science foundation of china [60778026]
语种	英语
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4764]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Qi HJ,Xiao Xiudi,He HB,et al. Optical properties and microstructure of Ta2O5 biaxial film[J]. appl. optics,2009,48(1):127, 133.
APA	齐红基,Xiao Xiudi,贺洪波,Yi Kui,&范正修.(2009).Optical properties and microstructure of Ta2O5 biaxial film.appl. optics,48(1),127.
MLA	齐红基,et al."Optical properties and microstructure of Ta2O5 biaxial film".appl. optics 48.1(2009):127.