Effects of annealing on microstructure and optical properties of TiO2 sculptured thin films

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Effects of annealing on microstructure and optical properties of TiO2 sculptured thin films
	Xiao Xiu-Di ; Dong Guo-Ping ; Qi HJ(齐红基) ; Fan ZX(范正修) ; He HB(贺洪波) ; Shao JD(邵建达)
刊名	chin. phys. lett.
	2008
卷号	25 期号:6 页码:2181
关键词	GLANCING ANGLE DEPOSITION TITANIUM-DIOXIDE TEMPERATURE
ISSN号	0256-307x
中文摘要	the evolution of microstructure and optical properties of tio2 sculptured thin films under thermal annealing is reported. xrd, field emission sem, uv-vis-nir spectra are employed to characterize the microstructural and optical properties. it is found that the optimum annealing temperature for linear birefringence is 500 degrees c. the maximum of transmission difference for linear birefringence is up to 18%, which is more than twice of that in as-deposited thin films. in addition, the sample annealed at 500 degrees c has a minimum of column angle about 12 degrees c. the competitive process between the microstructural and optical properties is discussed in detail. post-annealing is a useful method to improve the linear birefringence in sculptured thin films for practical applications.
学科主题	光学薄膜
语种	英语
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4696]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Xiao Xiu-Di,Dong Guo-Ping,Qi HJ,et al. Effects of annealing on microstructure and optical properties of TiO2 sculptured thin films[J]. chin. phys. lett.,2008,25(6):2181, 2184.
APA	Xiao Xiu-Di,Dong Guo-Ping,齐红基,范正修,贺洪波,&邵建达.(2008).Effects of annealing on microstructure and optical properties of TiO2 sculptured thin films.chin. phys. lett.,25(6),2181.
MLA	Xiao Xiu-Di,et al."Effects of annealing on microstructure and optical properties of TiO2 sculptured thin films".chin. phys. lett. 25.6(2008):2181.