Performance and reliability of multilayer silicon nanocrystal nonvolatile memory | |
Wang Liudi ; Zhang Zhigang ; Zhao Yue ; Mao Ping ; Pan Liyang | |
2010-10-12 ; 2010-10-12 | |
关键词 | Practical/ CMOS memory circuits elemental semiconductors integrated circuit reliability multilayers nanostructured materials random-access storage silicon/ multilayer nanocrystal nonvolatile memory NVM reliability CMOS technology triple-layer nanocrystal programming process memory window Si/ B1265D Memory circuits B2570D CMOS integrated circuits C5320G Semiconductor storage/ Si/int Si/el |
中文摘要 | Nonvolatile memories (NVMs) with triple layers of silicon nanocrystals were fabricated with conventional CMOS technology. This paper explores the program/erase performance and reliability of NVMs with three layers of nanocrystals. The results indicate that the nanocrystals in the triple-layer nanocrystal NVM (NCNVM) are difficult to fully charge during the programming process. The programming speed of the triple-layer NCNVMs is quicker than that of single-layer NCNVMs, which means that the second and third layers of nanocrystals in the triple-layer NCNVM affect the charge of the first layer nanocrystals. Reliability tests show that the memory window has little degradation after 1 * 10/sup 4/ cycles. |
语种 | 英语 |
出版者 | Tsinghua University Press ; China |
内容类型 | 期刊论文 |
源URL | [http://hdl.handle.net/123456789/82188] |
专题 | 清华大学 |
推荐引用方式 GB/T 7714 | Wang Liudi,Zhang Zhigang,Zhao Yue,et al. Performance and reliability of multilayer silicon nanocrystal nonvolatile memory[J],2010, 2010. |
APA | Wang Liudi,Zhang Zhigang,Zhao Yue,Mao Ping,&Pan Liyang.(2010).Performance and reliability of multilayer silicon nanocrystal nonvolatile memory.. |
MLA | Wang Liudi,et al."Performance and reliability of multilayer silicon nanocrystal nonvolatile memory".(2010). |
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