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	Comparison of oxidation resistance of copper treated by beam-line ion implantation and plasma immersion ion implantation
	An, Quanzhang ; Li, Liuhe ; Hu, Tao ; Xin, Yunchang ; Fu, Ricky K. Y. ; Kwok, D. T. K. ; Cai, Xun ; Chu, Paul K.
	2010-10-12 ; 2010-10-12
关键词	Copper Plasma immersion ion implantation Beam-line ion implantation Oxidation resistance THIN-FILMS POLYCRYSTALLINE COPPER CORROSION-RESISTANCE CU SURFACE AL Materials Science, Multidisciplinary
中文摘要	Copper which has many favorable properties such as low cost, high thermal and electrical conductivity, as well as easy fabrication and joining is one of the main materials in lead frames, interconnects, and foils in flexible circuits. Furthermore, copper is one of the best antibacterial materials. However, unlike aluminum oxide or chromium oxide, the surface copper oxide layer does not render sufficient protection against oxidation. In this work, in order to improve the surface oxidation resistance of Cu, Al and N were introduced into copper by plasma immersion ion implantation (PIII) and beam-line ion implantation (BII). The implantation fluences of Al and N were 2 x 10(17) ions cm(-2) and 5 x 10(16) ions cm(-2), respectively. The implanted and untreated copper samples were oxidized in air at 260 degrees C for 1 h. The X-ray diffraction (XRD), scanning electron microscopy (SEMI), as well as X-ray photoelectron spectroscopy (XPS) results indicate that both implantation methods can enhance the oxidation resistance of copper but to different extent. PIII is superior to BII in enhancing the oxidation resistance of copper. The effects and possible mechanisms are discussed. (C) 2009 Elsevier B.V. All rights reserved.
语种	英语 ; 英语
出版者	ELSEVIER SCIENCE SA ; LAUSANNE ; PO BOX 564, 1001 LAUSANNE, SWITZERLAND
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/81710]
专题	清华大学
推荐引用方式 GB/T 7714	An, Quanzhang,Li, Liuhe,Hu, Tao,et al. Comparison of oxidation resistance of copper treated by beam-line ion implantation and plasma immersion ion implantation[J],2010, 2010.
APA	An, Quanzhang.,Li, Liuhe.,Hu, Tao.,Xin, Yunchang.,Fu, Ricky K. Y..,...&Chu, Paul K..(2010).Comparison of oxidation resistance of copper treated by beam-line ion implantation and plasma immersion ion implantation..
MLA	An, Quanzhang,et al."Comparison of oxidation resistance of copper treated by beam-line ion implantation and plasma immersion ion implantation".(2010).

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