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	Measurement of period difference in grating pair based on compensation analysis of phase difference between diffraction beams
	Guo, Chao ; Zeng, Lijiang
	2010-10-12 ; 2010-10-12
关键词	LASER DIFFRACTOMETER INTENSITY PATTERNS PITCH MEASUREMENTS CALIBRATION COMPRESSOR MICROSCOPE ACCURATE Optics
中文摘要	We propose an experimental method for measuring the period difference in a grating pair. The method uses the relationship between the period difference and the phase difference of diffraction beams of the grating pair when gratings are translated along the grating-vector direction. The effect of the roll angular deviation of gratings can be eliminated by phase compensation with +1st- and -1st-order diffraction beams. Far-field intensity patterns of diffraction beams are monitored to adjust the relative attitude of gratings. For a pair of gratings with periods of similar to 0.674 mu m, the period difference was measured to be 0.4434 nm with an expanded uncertainty (k = 2) of 0.0113 nm. (C) 2009 Optical Society of America
语种	英语 ; 英语
出版者	OPTICAL SOC AMER ; WASHINGTON ; 2010 MASSACHUSETTS AVE NW, WASHINGTON, DC 20036 USA
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/80358]
专题	清华大学
推荐引用方式 GB/T 7714	Guo, Chao,Zeng, Lijiang. Measurement of period difference in grating pair based on compensation analysis of phase difference between diffraction beams[J],2010, 2010.
APA	Guo, Chao,&Zeng, Lijiang.(2010).Measurement of period difference in grating pair based on compensation analysis of phase difference between diffraction beams..
MLA	Guo, Chao,et al."Measurement of period difference in grating pair based on compensation analysis of phase difference between diffraction beams".(2010).

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