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	Modeling and process of mastering for multi-level run-length-limited optical discs
	Tang Yi ; Song Jie ; Pan Long-fa
	2010-10-12 ; 2010-10-12
关键词	Practical Theoretical or Mathematical Experimental/ light propagation optical disc storage optical multilayers photolithography/ multi level run length limited photolithographic model optical disc mastering vector diffraction light spot light propagation multilayer film structure/ A4280T Optical storage and retrieval A4225B Optical propagation, transmission and absorption A4270 Optical materials B4120 Optical storage and retrieval B5210E Light propagation B4110 Optical materials
中文摘要	A photolithographic model for optical disc mastering is established. In this model, vector diffraction is used to calculate the intensity distribution of focused light spot,and the light propagation in multi-layer film structure is used to describe the light propagation in photo-resist. The experimental and simulation results are presented, including the influences of key process parameters on typical multi-level pit width and depth. These process parameters consist of photo-resist thickness, development time and developer concentration. Experimental results show that the decrease of photo-resist thickness will cause the increase of width and the decrease of depth. The increases of development time and developer concentration have the same effect, both will cause the increases of width and depth. The deviation between simulation and experiment is kept within +5 nm, which shows that the experiment is coincident with the simulation well. The analysis results are helpful to practical multi-level disc mastering. Meanwhile,the model can be used to analyze other process parameters and other disc formats.
语种	中文
出版者	Editorial Board of Optics and Precision Engineering ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/80354]
专题	清华大学
推荐引用方式 GB/T 7714	Tang Yi,Song Jie,Pan Long-fa. Modeling and process of mastering for multi-level run-length-limited optical discs[J],2010, 2010.
APA	Tang Yi,Song Jie,&Pan Long-fa.(2010).Modeling and process of mastering for multi-level run-length-limited optical discs..
MLA	Tang Yi,et al."Modeling and process of mastering for multi-level run-length-limited optical discs".(2010).

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