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	Design and realization of comb-finger micromechanical accelerometer
	Li Tong-jie ; Dong Jing-xin ; Liu Yun-feng
	2010-10-12 ; 2010-10-12
关键词	Practical/ accelerometers micromechanical devices microsensors/ comb-finger micromechanical accelerometer MEMS micromechanical accelerometer servo system PID correction parameters feedback gain turn-on repeatability error/ B7230M Microsensors and nanosensors B7320E Velocity, acceleration and rotation measurement B2575 MEMS and NEMS device technology
中文摘要	As an important device of MEMS, Micromechanical accelerometer has been widely used in commercial and military fields. This paper presents the design and realization of the Micromechanical accelerometer. At first, the configuration principle and mathematical model of the Micromechanical accelerometer servo system, especially the relationships among its parts, are discussed. And then, key parameters, which are preload voltage, PID correction parameters and feedback gain, are specific analyzed. Finally, the accelerometer is tested in the lab, the measurement range of it is +/-15 g/sub n/, the nonlinear scale is 0.041 9%, the threshold value is 0.1 mg/sub n/, the standard deviation of two hours operating is 0.084 5 mg/sub n/ and the 20 times turn-on repeatability error is 0.156 mg/sub n/.
语种	中文
出版者	Southeast University ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/80309]
专题	清华大学
推荐引用方式 GB/T 7714	Li Tong-jie,Dong Jing-xin,Liu Yun-feng. Design and realization of comb-finger micromechanical accelerometer[J],2010, 2010.
APA	Li Tong-jie,Dong Jing-xin,&Liu Yun-feng.(2010).Design and realization of comb-finger micromechanical accelerometer..
MLA	Li Tong-jie,et al."Design and realization of comb-finger micromechanical accelerometer".(2010).

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