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	A novel laser feedback interferometer for metrology of large range displacement
	Mao, W. ; Zhang, S.I.
	2010-10-12 ; 2010-10-12
关键词	Practical/ laser feedback laser ranging light interferometers/ laser feedback interferometer large range displacement metrology birefringence-Zeeman dual frequency laser optical feedback effects quartz crystal/ B7320C Spatial variables measurement B4360E Metrological applications of lasers
中文摘要	This paper presents a novel laser feedback interferometer for metrology of large range displacement. A birefringence-Zeeman dual frequency laser is applied in the system. Due to its strong optical feedback effects, the intensity modulation curves of the two polarized lights will have a zero intensity part in a period. A quartz crystal is used in the external feedback cavity as a birefringent element. And a phase difference between the two lights can be adjusted to pi /2. Thus, the intensity modulation curves in a period can be divided into four polarization zones with equal width. When the displacement of the object to be measured is produced, the four polarization zones will appear in sequence. According to the appearance order of the four zones, the direction of the displacement can be discriminated without ambiguity and the resolution of the system can be greatly increased. It is confirmed that the laser feedback interferometer has a resolution of 79.1 nm and with a linearity of 0.01 % over the whole measurement range of 15 mm.
语种	英语
出版者	Trans Tech Publications Ltd. ; Switzerland
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/80143]
专题	清华大学
推荐引用方式 GB/T 7714	Mao, W.,Zhang, S.I.. A novel laser feedback interferometer for metrology of large range displacement[J],2010, 2010.
APA	Mao, W.,&Zhang, S.I..(2010).A novel laser feedback interferometer for metrology of large range displacement..
MLA	Mao, W.,et al."A novel laser feedback interferometer for metrology of large range displacement".(2010).

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