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	A novel technique of microforce sensing and loading
	Xide Li ; Dongchuan Su ; Zhao Zhang
	2010-10-12 ; 2010-10-12
关键词	Practical Experimental/ atomic force microscopy cantilevers force sensors microsensors/ microforce sensing loading method cantilever probes atomic force microscope AFM single silk filament papilla lotus leaf surface/ A0670D Sensing and detecting devices A0710C Micromechanical and nanomechanical devices and systems A0630M Measurement of mechanical variables A0779 Scanning probe microscopy and related techniques B7230M Microsensors and nanosensors B2575 MEMS and NEMS device technology B7320G Mechanical variables measurement
中文摘要	With remarkable reduction of the characteristic scales in researches of materials and structures, microforce sensing and loading is becoming an important and challenging issue in mechanical tests. On the one hand, miniaturization of the tested objects leads to serious problems of manipulating, grasping, and loading. On the other hand, the smaller a sample is, the smaller the forces have to be measured. Up to now, it is still a difficult task to measure such small forces. In this paper, a newly developed probe-type microforce sensor is described, which can be combined with a micromanipulator to perform microforce sensing and loading. A strategy call ladder or hierarchy force sensing and loading method is further suggested, by which the above combined system is used as a platform to calibrate other cantilever probes with finer resolutions, which may form a sequence of probe-type sequence microforce sensors to cover a broad range of forces to be measured from mN down to nN and even lower provided that proper spring constants are selected for these force sensors. In the preliminary studies, two probe-type microforce sensors are successfully developed with force sensing sensitivities of 705.4 nN/mV and 37.3 nN/mV, respectively. They are applied to calibrate atomic force microscope (AFM) cantilevers with various spring constants, and then one of these calibrated cantilevers is used as a more sensitive force sensor to calibrate other even softer cantilevers. Tests of real microscale objects, a single silk filament and a papilla on the lotus leaf surface, demonstrate excellent performance of the developed sensors.[All rights reserved Elsevier].
语种	英语
出版者	Elsevier Sequoia S.A. ; Switzerland
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/79194]
专题	清华大学
推荐引用方式 GB/T 7714	Xide Li,Dongchuan Su,Zhao Zhang. A novel technique of microforce sensing and loading[J],2010, 2010.
APA	Xide Li,Dongchuan Su,&Zhao Zhang.(2010).A novel technique of microforce sensing and loading..
MLA	Xide Li,et al."A novel technique of microforce sensing and loading".(2010).

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