利用等效层的消偏振宽带减反膜设计

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	利用等效层的消偏振宽带减反膜设计; Design of Non-Polarizing Broadband Antireflection Coating Using Equivalent Layer
	马小凤 ; 王丹 ; 刘定权 ; 陈刚 ; 张凤山
刊名	光学学报
	2007
卷号	27 期号:3 页码:563
关键词	光学薄膜 thin film optics 消偏振 non-polarizing 等效层 equivalent layer 减反膜 antireflection coating
ISSN号	0253-2239
其他题名	Design of Non-Polarizing Broadband Antireflection Coating Using Equivalent Layer
中文摘要	分析了倾斜入射条件下导致光学薄膜产生偏振的原因, 针对不同偏振态的等效导纳与等效相位进行了分析, 并计算了对称膜层在45°入射条件下不同偏振态的等效折射率与等效相位厚度, 采用等效层方法设计了光学性能良好的600～900 nm波段消偏振宽带减反膜。最后利用电子束蒸发技术制备了薄膜样品, 样品的光谱性能完全能够满足使用要求。其中在600～900 nm波段范围内, 平均反射率均小于1.38%, 反射率的偏振度均低于0.89％。另外, 通过对其理论及实验光学性能、角度敏感性、膜层厚度误差敏感性等方面的分析结果可; The reasons leading to polarization for optical coatings at oblique incidence were analyzed. Analysis was made for the equivalent admittance and phase of different polarization states, and the equivalent indices and phase thickness for both polarizations of a symmetrical structure at 45° incidence were computed. Then a non-polarizing broadband antireflection coating with good optical performance within 600～900 nm was designed by using equivalent layer method. A sample was fabricated through electron beam evaporation technique, and its optical performance absolutely satisfied the requirements. From 600 to 900 nm, the average reflectance was less than 1.38%, and the polarization of reflectance was lower than 0.89%. In addition, after analyzing its theoretical and experimental performance, angle sensitivity and layer-thickness error sensitivity, we drew a conclusion that symmetrical layer combination was a practical way to design a non-polarizing broadband antireflection coating at oblique incidence.
学科主题	光学薄膜
分类号	O484
收录类别	ei
语种	中文
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4564]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	马小凤,王丹,刘定权,等. 利用等效层的消偏振宽带减反膜设计, Design of Non-Polarizing Broadband Antireflection Coating Using Equivalent Layer[J]. 光学学报,2007,27(3):563, 566.
APA	马小凤,王丹,刘定权,陈刚,&张凤山.(2007).利用等效层的消偏振宽带减反膜设计.光学学报,27(3),563.
MLA	马小凤,et al."利用等效层的消偏振宽带减反膜设计".光学学报 27.3(2007):563.