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	Finite element analysis and experiment on piezoelectric bimorph
	Li Long-tu ; Wu Jun-fei ; Chu Xiang-cheng ; Ji Ye
	2010-10-12 ; 2010-10-12
关键词	Practical Theoretical or Mathematical/ beams (structures) deformation elastic moduli finite element analysis lead compounds piezoelectric actuators vibrations/ finite element analysis piezoelectric bimorph bimorph deformation middle elastic beam piezoelectric layer elastic modulus scanning vibrometer voltage 60 V voltage 20 V PZT/ B2860A Piezoelectric devices B8380 Control gear and apparatus B0290T Finite element analysis E1550 Control technology and theory E3640 Measurement and control instrumentation industry E2180A Elasticity (mechanical engineering) E2180D Vibrations and shock waves (mechanical engineering) E0210L Numerical analysis/ voltage 6.0E+01 V voltage 2.0E+01 V/ PbZrO3TiO3/int TiO3/int ZrO3/int O3/int Pb/int Ti/int Zr/int O/int PbZrO3TiO3/ss TiO3/ss ZrO3/ss O3/ss Pb/ss Ti/ss Zr/ss O/ss
中文摘要	The deformation of bimorph is analyzed by using the Finite Element Method (FEM). The influences of middle elastic beam and piezoelectric layer on the deflection actuator are studied. The correlations of the applied voltage, the elastic modulus of beam and the thickness of piezoelectric layer are analyzed quantitatively to provide a theoretical basis and design method for the bimorph actuators. The mechanical force derived from the bimorph deformation is also studied. Furthermore, experiments are carried out to validate the finite element model. The vilidation shows that the tip-deflection can be as high as 166 mu m at a voltage of 60 V, while the mechanical force is 34. 7 m ldr N. The experiment results demonstrate that the piezoelectric bimorph model used in this paper is feasible and effective. Moreover, the resonance property of the bimorph is measured by the polytec 300-F scanning vi- brometer. The bimorph performs an exceeding deflection about 1. 7 mm at the tip when it resonates at a frequency about 310 Hz under an alternating voltage of 20 Vp-p. These numerical and experimental results are useful to design and optimize the piezoelectric bimorph.
语种	中文
出版者	Editorial Board of Optics and Precision Engineering ; China
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/78216]
专题	清华大学
推荐引用方式 GB/T 7714	Li Long-tu,Wu Jun-fei,Chu Xiang-cheng,et al. Finite element analysis and experiment on piezoelectric bimorph[J],2010, 2010.
APA	Li Long-tu,Wu Jun-fei,Chu Xiang-cheng,&Ji Ye.(2010).Finite element analysis and experiment on piezoelectric bimorph..
MLA	Li Long-tu,et al."Finite element analysis and experiment on piezoelectric bimorph".(2010).

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