The effect of diffusion and overhangs/vacancies on the microstructure of zig-zag thin film

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	The effect of diffusion and overhangs/vacancies on the microstructure of zig-zag thin film
	Qi HJ(齐红基) ; Shao J. D. ; Zhang D. P. ; Yi K. ; Fan Z. X.
刊名	appl. surf. sci.
	2007
卷号	253 期号:6 页码:3004
关键词	simulation growth model
ISSN号	0169-4332
中文摘要	basing on some growth models of thin film, we have investigated the growth mechanism of glancing angle deposition (glad) film. the simulation verifies that the overhangs/vacancies also contribute to the columnar growth as well as the self-shadowing effect for glad thin film. besides, we have studied the effect of the deposition rate, surface and bulk diffusions on the microstructure of thin film using the time-dependent monte carlo method. the results show that the surface and bulk diffusions can significantly enhance the packing density of thin film in glad growth, and the increase of the deposition rate induce the moderate decrease of the packing density. (c) 2006 elsevier b.v. all rights reserved.
学科主题	光学薄膜
收录类别	EI
语种	英语
WOS记录号	WOS:000243830000003
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4534]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Qi HJ,Shao J. D.,Zhang D. P.,et al. The effect of diffusion and overhangs/vacancies on the microstructure of zig-zag thin film[J]. appl. surf. sci.,2007,253(6):3004, 3008.
APA	齐红基,Shao J. D.,Zhang D. P.,Yi K.,&Fan Z. X..(2007).The effect of diffusion and overhangs/vacancies on the microstructure of zig-zag thin film.appl. surf. sci.,253(6),3004.
MLA	齐红基,et al."The effect of diffusion and overhangs/vacancies on the microstructure of zig-zag thin film".appl. surf. sci. 253.6(2007):3004.