Graded index 532HR/1064HT filter by glancing angle deposition

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Graded index 532HR/1064HT filter by glancing angle deposition
	Shen Zi-Cai ; Liu SJ(刘世杰) ; Huang Jian-Bing ; Shao JD(邵建达) ; Fan Zheng-Xiu
刊名	chin. phys. lett.
	2007
卷号	24 期号:4 页码:1029
ISSN号	0256-307x
中文摘要	glancing angle deposition is a novel method to prepare graded index coatings. by using this method and physical vapour deposition, zro2 is used to engineer graded index filter on bk7 glass substrate. controlling the deposition rate and the periodic oscillation of oblique angle of deposited material, a 10-period graded index zro2 filter with high reflection near 532 nm and high transmittance at wavelength 1064 nm is fabricated. the causes of difference between the theoretical and experimental results are discussed in detail. the material properties and electron gun nonlinearity are possibly the main origins of the difference, which result in the variations in both thickness control and deposition rate of the elm material.
学科主题	光学薄膜
收录类别	0
语种	英语
WOS记录号	WOS:000245777700050
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4508]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Shen Zi-Cai,Liu SJ,Huang Jian-Bing,et al. Graded index 532HR/1064HT filter by glancing angle deposition[J]. chin. phys. lett.,2007,24(4):1029, 1031.
APA	Shen Zi-Cai,刘世杰,Huang Jian-Bing,邵建达,&Fan Zheng-Xiu.(2007).Graded index 532HR/1064HT filter by glancing angle deposition.chin. phys. lett.,24(4),1029.
MLA	Shen Zi-Cai,et al."Graded index 532HR/1064HT filter by glancing angle deposition".chin. phys. lett. 24.4(2007):1029.