纳米Mo膜的光学特性及最小连续膜厚研究

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	纳米Mo膜的光学特性及最小连续膜厚研究
	范平 ; 邵建达 ; 易葵 ; 齐红基 ; 范正修
刊名	中国激光
	2005
卷号	32 期号:7 页码:977
关键词	薄膜光学特性尺寸效应纳米Mo膜最小连续膜厚 thin films optical properties size effect Mo nano-film minimal continuous thickness
ISSN号	0258-7025
其他题名	Optical properties and the minimal continuous thickness of molybdenum nano-films
中文摘要	利用Lambda-900分光光度计，在波长为310～1250nm范围内测量了离子束溅射沉积不同厚度纳米Mo膜的反射率和透射率。选定波长为310nm，350nm，400nm，500nm，550nm，632nm，800nm，1200nm时对薄膜的反射率、透射率和吸收率随膜厚变化的关系进行了讨论。实验结果显示，纳米Mo膜的光学特性有明显的尺寸效应。提出将薄膜对光波长为550nm时的反射率和透射率随Mo膜厚度变化关系的交点对应的厚度作为特征厚度，该厚度可认为是纳米Mo膜生长从不连续膜进入连续膜的最小连续膜厚。利用; Mo nano-films of different thicknesses have been prepared by ion beam sputtering. The reflectance and transmittance of Mo nano-films in the range of 310 nm to 1250 nm have been measured by Lambda-900 spectrophotometer. Relationships of the reflectance, transmittance, absorptance to the thickness of Mo nano-films in the wavelengths selected 310 nm, 350 nm, 400 nm, 500 nm, 550 nm, 632 nm, 800 nm and 1200 nm have been discussed. The results showed that the optical properties of Mo nano-films have obvious size effect. There is a point of intersection, which is located in the curves of relationships of the reflectance, transmittance to the thickness of Mo nano-films at the wavelength of 550 nm. The corresponding thickness of this point of intersection can be thought of as the minimal continuous thickness of the growth of metal films from discontinuous to continuous in the optical properties. The topography image of Mo nano-film with thickness of 15.76 nm was obtained by using atomic force microscopy (AFM). This topography image is already the topography image of the continuous film.
学科主题	光学薄膜
分类号	O484
收录类别	ei
语种	中文
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4460]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	范平,邵建达,易葵,等. 纳米Mo膜的光学特性及最小连续膜厚研究[J]. 中国激光,2005,32(7):977, 981.
APA	范平,邵建达,易葵,齐红基,&范正修.(2005).纳米Mo膜的光学特性及最小连续膜厚研究.中国激光,32(7),977.
MLA	范平,et al."纳米Mo膜的光学特性及最小连续膜厚研究".中国激光 32.7(2005):977.