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	电泳沉积法制备Ba_(0.6)Sr_(0.4)TiO_3厚膜及介电性能研究
	王希林 ; 薛昊 ; 周和平 ; Wang Xili ; Xue Hao ; Zhou Heping
	2010-06-10 ; 2010-06-10
关键词	电泳沉积 BST厚膜 介电性能 electrophoretic deposition thick films Ba0.6Sr0.4TiO3 tunable TB302
其他题名	Fabrication of Ba_(0.6)Sr_(0.4)TiO_3 Ceramic Thick Film by Electrophoretic Deposition Process
中文摘要	采用溶胶凝胶法制备了钛酸锶钡超细粉体,在纯乙醇中配制成悬浮液,利用电泳沉积技术在印刷铂的氧化铝基板上沉积得到了BST厚膜。通过控制悬浮液中粉体的浓度和超声振荡实现了悬浮液的稳定。电泳沉积过程中通过改变电压和沉积时间研究了厚膜质量和厚膜的厚度。利用扫描电子显微镜(SEM)观察了沉积物的微观结构形貌,对沉积质量进行了对比研究。实验结果表明,当外加电场强度为20V/cm,沉积时间为30s时得到的厚膜表面质量较好,厚度适合。实验发现1200℃烧结温度得到的厚膜致密度较好。X射线衍射分析(XRD)图谱表明烧结后得到的BST厚膜具有典型的钙钛矿结构。对厚膜的介电性能测试发现,BST厚膜有一定的介电性能,展示了BST材料的非线性特性。; Ultrafine powders of BST(Ba0.6Sr0.4TiO3) fabricated by sol-gel method were mixed with pure ethanol to get a stable suspension.And BST thick films were deposited on alumina substrate by EPD(Electrophoretic Deposition) process.The effects of the different applied voltages and deposition durations on the quality and thickness of the films were investigated.The microstructures were observed by SEM.The surface quality of the film is satisfactory with the applied electric field strength of 20 V/cm within 30 s.The density of the thick film sintered at 1200℃ is higher than that of other samples sintered at 1100℃ and 1300℃.X-ray diffraction analysis indicates that the thick film consist of perovskite structure.Analysis on the dielectric properties of the thick film shows that the film possessed certain nonlinearity and tenability.; 国家自然科学基金(50572050)
语种	中文 ; 中文
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/61416]
专题	清华大学
推荐引用方式 GB/T 7714	王希林,薛昊,周和平,等. 电泳沉积法制备Ba_(0.6)Sr_(0.4)TiO_3厚膜及介电性能研究[J],2010, 2010.
APA	王希林,薛昊,周和平,Wang Xili,Xue Hao,&Zhou Heping.(2010).电泳沉积法制备Ba_(0.6)Sr_(0.4)TiO_3厚膜及介电性能研究..
MLA	王希林,et al."电泳沉积法制备Ba_(0.6)Sr_(0.4)TiO_3厚膜及介电性能研究".(2010).

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