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	用于微全分析系统的数字化微流控芯片的研究
	吴建刚 ; 岳瑞峰 ; 曾雪锋 ; 康明 ; 胡欢 ; 王喆垚 ; 刘理天 ; Wu Jiangang ; Yue Ruifeng ; Zeng Xuefeng ; Kang Ming ; Hu Huan ; Wang Zheyao ; Liu Litian
	2010-06-09 ; 2010-06-09
关键词	数字化微流控芯片 微机械 表面张力 介质上电润湿 Digital microfluidic chips,micro-electro-mechanical system,surface tension,electrowetting on dielectric TN492
其他题名	Studies on Digital Microfluidic Chip for Micro-Total-Analysis Systems
中文摘要	研制出一种基于介质上电润湿(electrowetting-on-d ielectric,EWOD)机制的可编程数字化微流控芯片。它采用“三明治”结构:受控离散液滴被夹在两极板之间;下极板以硅为衬底,掺杂多晶硅作为芯片微电极阵列,其上涂覆有Teflon(AF1600薄膜的S iO2作为疏水性介质层;上极板是涂覆有Teflon(AF1600疏水薄膜的透明电极。通过分析数字化微流控系统的基本操作(离散液滴的传输、拆分及混合)的物理机理和模拟优化,在35 V低驱动电压下实现了约0.35μL和0.45μL去离子水离散液滴的传输和合并,并在70 V驱动电压下实现了0.8μL液滴的拆分等操作。; A programmable digital microfluidic chip based on electrowetting-on-dielectric is presented,(consisting) of a sandwiched configuration.The controlled droplets were sandwiched between two(parallel) plates.The bottom plate consists of silicon used as the substrate,a heavy doped poly-silicon as the microelectrode(array),a SiO_2 film spin-coated by a Teflon AF1600 film as the hydrophobic dielectric layer.The top plate is a transparent electrode spin-coated by a Teflon AF1600 film.The physical mechanisms and simulations of the fundamental fluidic operations(transporting,cutting,and merging) based on electrowetting-on-dielectric were researched.The operations of transporting and merging on deionized droplets of 0.35 μL and 0.45 μL were successfully achieved in air by applying the low actuation voltages of 35 V,and the cutting operation on the deionized droplet of 0.8 μL was also achieved by applying the voltage of 70 V.; 国家自然科学基金资助项目(No.10472055,60401009); 清华大学基础研究资金(No.JC2003060,JC2003061)
语种	中文 ; 中文
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/57094]
专题	清华大学
推荐引用方式 GB/T 7714	吴建刚,岳瑞峰,曾雪锋,等. 用于微全分析系统的数字化微流控芯片的研究[J],2010, 2010.
APA	吴建刚.,岳瑞峰.,曾雪锋.,康明.,胡欢.,...&Liu Litian.(2010).用于微全分析系统的数字化微流控芯片的研究..
MLA	吴建刚,et al."用于微全分析系统的数字化微流控芯片的研究".(2010).

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