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	具有聚酰亚胺绝热层的新型非制冷红外探测器
	刘兴明 ; 韩琳 ; 刘理天 ; LIU Xing-ming ; HAN Lin ; LIU Li-tian
	2010-06-09 ; 2010-06-09
关键词	聚酰亚胺 测辐射热计 绝热结构 polyimide bolometer thermal-isolation structure TN215
其他题名	New Type of Uncooled Infrared Detector with Polyimide Thermal-Isolation Structure
中文摘要	提出了一种基于聚酰亚胺绝热层的新型非制冷红外探测器结构.该结构具有工艺简单、成本低廉、成品率高等优点.利用底部反射金属层可以提高红外吸收率;底层金属和有源层间的隔离层不仅可以减小器件热导,还可以和上层材料层构成三明治红外吸收结构,进一步改善红外吸收效果.对制备工艺进行了简单介绍,器件性能测试结果表明,该新结构探测器虽然和空腔结构探测器的探测率相当,但在工艺制备及成品率方面要优异得多.; A new type of uncooled infrared detector with polyimide thermal-isolation structure is presented. The detector has the advantage of simpler process, lower cost and higher yield. The bottom reflective metal layer can improve the infrared absorption. The unique sandwich structure consists of the segregation layer, located between the metal and the active layer, and upper layers can further improve infrared absorption as well. At the same time, the segregation layer decreases thermal conductance of the sensor. The process is described briefly and the performance is tested in this paper. Compared with the detector use air gap as thermal-isolation structure, the structure prepared has not only comparable performance but simpler process and higher yield.
语种	中文 ; 中文
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/56962]
专题	清华大学
推荐引用方式 GB/T 7714	刘兴明,韩琳,刘理天,等. 具有聚酰亚胺绝热层的新型非制冷红外探测器[J],2010, 2010.
APA	刘兴明,韩琳,刘理天,LIU Xing-ming,HAN Lin,&LIU Li-tian.(2010).具有聚酰亚胺绝热层的新型非制冷红外探测器..
MLA	刘兴明,et al."具有聚酰亚胺绝热层的新型非制冷红外探测器".(2010).

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