HfO2 膜料中的杂质对薄膜损伤及性能的影响; Effects of impurities on the damage and property for HfO2 coating material | |
Wu SG ; 邵建达 ; Yi K ; Zhao YN ; 范正修 | |
刊名 | 稀有金属材料与工程
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2006 | |
卷号 | 35期号:5页码:757 |
关键词 | HfO2 coating material impurities metal element absorption dielectric Zr element negative ion element |
ISSN号 | 1002-185X |
其他题名 | Effects of impurities on the damage and property for HfO2 coating material |
中文摘要 | By analysis of impurity elements in HfO2 coating material, the influence of main impurity elements on the characteristic of coatings were studied. The results indicate that the metal elements and absorptive dielectric elements damage the HfO2 coatings. The more the Zr element content is, the more the absorption is for the coatings in ultraviolet wave. The negative ion element will become the gas source center and form an ejection in the process of evaporation of coating material, so decrease the damage threshold of the coatings. |
学科主题 | 光学薄膜 |
收录类别 | ei |
语种 | 中文 |
公开日期 | 2009-09-22 |
内容类型 | 期刊论文 |
源URL | [http://ir.siom.ac.cn/handle/181231/4164] ![]() |
专题 | 上海光学精密机械研究所_光学薄膜技术研究与发展中心 |
推荐引用方式 GB/T 7714 | Wu SG,邵建达,Yi K,等. HfO2 膜料中的杂质对薄膜损伤及性能的影响, Effects of impurities on the damage and property for HfO2 coating material[J]. 稀有金属材料与工程,2006,35(5):757, 760. |
APA | Wu SG,邵建达,Yi K,Zhao YN,&范正修.(2006).HfO2 膜料中的杂质对薄膜损伤及性能的影响.稀有金属材料与工程,35(5),757. |
MLA | Wu SG,et al."HfO2 膜料中的杂质对薄膜损伤及性能的影响".稀有金属材料与工程 35.5(2006):757. |
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