Subsurface damage in optical substrates

CORC > 上海光学精密机械研究所 > 中国科学院上海光学精密机械研究所 > 光学薄膜技术研究与发展中心

	Subsurface damage in optical substrates
	Shen J(沈健) ; Liu SH(刘守华) ; Yi K(易葵) ; He HB(贺洪波) ; Shao JD(邵建达) ; Fan ZX(范正修)
刊名	optik
	2005
卷号	116 期号:6 页码:288
关键词	subsurface damage subsurface defect laser-induced damage threshold optical thin film
ISSN号	0030-4026
中文摘要	the origin, character, analysis and treatment of subsurface damage (ssd) were summarized in this paper. ssd, which was introduced to substrates by manufacture processes, may bring about the decrease of laser-induced damage threshold (lidt) of substrates and thin films. nondestructive evaluation (nde) methods for the measurement of ssd were used extensively because of their conveniences and reliabilities. the principle, experimental setup and some other technological details were given for total internal reflection microscopy (tirm), high-frequency scanning acoustic microscopy (hfsam) and laser-modulated scattering (lms). however, the spatial resolution, probing depth and theoretic models of these nde methods demanded further studies. furthermore, effective surface treatments for minimizing or eliminating ssd were also presented in this paper. both advantages and disadvantages of ion beam etching (ibe) and magnetorheological finishing (mrf) were discussed. finally, the key problems and research directions of ssd were summarized. (c) 2005 elsevier gmbh. all rights reserved.
学科主题	光学薄膜
收录类别	EI
语种	英语
WOS记录号	WOS:000230671400009
公开日期	2009-09-22
内容类型	期刊论文
源URL	[http://ir.siom.ac.cn/handle/181231/4162]
专题	上海光学精密机械研究所_光学薄膜技术研究与发展中心
推荐引用方式 GB/T 7714	Shen J,Liu SH,Yi K,et al. Subsurface damage in optical substrates[J]. optik,2005,116(6):288, 294.
APA	沈健,刘守华,易葵,贺洪波,邵建达,&范正修.(2005).Subsurface damage in optical substrates.optik,116(6),288.
MLA	沈健,et al."Subsurface damage in optical substrates".optik 116.6(2005):288.