| 微型复合溅射离子泵的设计研究 | |
| 胡银富 ; 齐京 ; 陈旭 ; Hu Yinfu ; Qi Jing ; Chen Xu | |
| 2010-06-09 ; 2010-06-09 | |
| 关键词 | 真空器件 溅射离子泵 非蒸散型吸气剂 Vacuum device,Sputtering ion pump,NEG TP391.7 |
| 其他题名 | Newly-Developed Miniaturized Compound Sputtering Ion Pump |
| 中文摘要 | 本文介绍了一种非蒸散型吸气剂(NEG)与微型溅射离子泵(SIP)集成构成的微型复合溅射离子泵。测试结果表明,当吸气剂激活后,复合泵的抽速达到0.45 L/s,比未加吸气剂的同型溅射离子泵抽速提高了28%。该复合泵使真空器件的真空维持效果良好,可广泛应用于中小型的密闭真空器件中。; A novel type of miniaturized compound sputtering-ion-pump(SIP) has been successfully developed and manufactured,in which the non-evaporation getter(NEG),wrapped up with stainless steel mesh,is installed in the narrow space between the iner wall of the pump cavity and the electrodes.And the enclosed magnets were designed,which can be removed during pump baking to activate the NEG.After the NEG is activated,its pumping speed is evaluated to be 0.45 L/s,28% higher than the conventional SIP without NEG.Its design details and its possible applications were also discussed. |
| 语种 | 中文 ; 中文 |
| 内容类型 | 期刊论文 |
| 源URL | [http://hdl.handle.net/123456789/54041]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | 胡银富,齐京,陈旭,等. 微型复合溅射离子泵的设计研究[J],2010, 2010. |
| APA | 胡银富,齐京,陈旭,Hu Yinfu,Qi Jing,&Chen Xu.(2010).微型复合溅射离子泵的设计研究.. |
| MLA | 胡银富,et al."微型复合溅射离子泵的设计研究".(2010). |
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