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	基于准连续介质法预测薄膜材料纳米硬度和弹性模量
	黎军顽 ; 江五贵 ; LI Junwan ; JIANG Wugui
	2010-06-08 ; 2010-06-08
关键词	准连续介质法 纳米压痕 尺寸效应 纳米硬度 弹性模量 quasicontinuum method nanoindentation size effect nanohardness elastic modulus TB383.2
其他题名	PREDICTIONS OF NANOHARDNESS AND ELASTIC MODULUS OF THIN FILM MATERIAL WITH THE QUASICONTINUUM METHOD
中文摘要	采用准连续介质法模拟了单晶Al和单晶Cu纳米压痕实验中的初始塑性变形过程,获得了压头在不同压深下的加载和卸载曲线.在计算得到的载荷-压深曲线基础上,根据Oliver-Phart法计算了薄膜材料的接触刚度、纳米硬度和弹性模量,并与相关文献的实验结果进行了比较.研究表明,接触刚度-位移曲线呈线性关系;纳米硬度测量中存在尺寸效应,而在弹性模量测量中却不存在尺寸效应.单晶Al和单晶Cu纳米硬度和弹性模量计算值分别为(0.584±0.013)和(84.088±0.332)GPa,(0.755±0.027)和(131.833±4.449)GPa.预测值与实验结果吻合,表明使用该方法预测薄膜材料的纳米硬度和弹性模量是可行的.; Quasicontinuum method was used to simulate the initial plastic deformation of both single crystals of aluminium and copper in nanoindentation test.The corresponding loading and un- loading curves at different depths were obtained.Based on the calculated load-depth curves,the contact stiffnesses,nanohardnesses and elastic moduli for thin film materials were evaluated using the Oliver-Pharr method and were compared with experimental results in the publised literatures.The results show that the contact stiffness-displacement curves are linear,and the size effect exists in nanohardness measurement,but doesn't in elastic modulus measurement.The calculated nanohard- nesses and elastic moduli of both single crystals of aluminium and copper are(0.584�013)and (84.088�332)GPa,(0.755�027)and(131.833�449)GPa,respectively,which agree with the ex- periments indicating that the presented approach is reliable for prediction of the nanohardness and elastic modulus of thin film materials.; 国家重点基础研究发展计划资助项目G2003CB61503
语种	中文 ; 中文
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/51312]
专题	清华大学
推荐引用方式 GB/T 7714	黎军顽,江五贵,LI Junwan,等. 基于准连续介质法预测薄膜材料纳米硬度和弹性模量[J],2010, 2010.
APA	黎军顽,江五贵,LI Junwan,&JIANG Wugui.(2010).基于准连续介质法预测薄膜材料纳米硬度和弹性模量..
MLA	黎军顽,et al."基于准连续介质法预测薄膜材料纳米硬度和弹性模量".(2010).

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