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	减少阻力的MEMS初始位置定位机构设计与性能分析
	李华 ; 石庚辰 ; LI Hua ; SHI Geng-chen
	2010-06-08 ; 2010-06-08
关键词	微机电系统 初始位置定位机构 LIGA 离心实验 micro electro mechanical system initial position latch mechanism LIGA centrifugal test TH703
其他题名	Design and Performance Analysis of a Resistance Reduction MEMS Initial Position Latch Mechanism
中文摘要	根据微机电系统(MEMS)加工工艺特点和初始位置定位机构的设计要求,设计了两种MEMS初始位置定位机构的结构方案.通过力学分析,求出了定位机构解除定位所需要克服的阻力计算公式,用ANSYS仿真验证了其正确性.根据满足系统性能要求和利于装配两者均衡的原则,对两种定位机构的设计方案进行了对比研究,选择能减少阻力的MEMS初始位置定位机构.采用MEMS工艺中的LIGA工艺加工出初始位置定位机构.用VDS92-1430离心实验机分别加速到3 000 r/min、5 000 r/min、8 000 r/min和12 000 r/min进行离心实验.实验结果表明,设计的MEMS初始位置定位机构能正常工作,性能达到了设计要求.; According to the characteristic of micro electro mechanical systems(MEMS) fabrication technology and the design requirements for the initial position latch mechanism,two MEMS initial position latch mechanisms were designed.By mechanical analysis,the calculation formular of resistance that the initial position latch mechanism needed to overcome was determined,which was validated by ANSYS simu￣lation.According to the balance principle between satisfaction of the system requirements and feasibility of assembly,the two MEMS initial position latch mechanisms were compared and the resistance reduction MEMS initial position latch mechanism was chosen.The MEMS initial position latch mechanism was fabricated with LIGA technology which was one of the MEMS fabrication technology.The centrifugal tests were carried by VDS92-1430 centrifugal tester which was accelerated to 3 000,5 000,8 000 and 12 000 r/min respectively.The test result shows that the designed MEMS initial position latch mechanism can work properly and meets the design requirement.; 国防科技重点实验室基金资助项目(514850301)
语种	中文 ; 中文
内容类型	期刊论文
源URL	[http://hdl.handle.net/123456789/49893]
专题	清华大学
推荐引用方式 GB/T 7714	李华,石庚辰,LI Hua,等. 减少阻力的MEMS初始位置定位机构设计与性能分析[J],2010, 2010.
APA	李华,石庚辰,LI Hua,&SHI Geng-chen.(2010).减少阻力的MEMS初始位置定位机构设计与性能分析..
MLA	李华,et al."减少阻力的MEMS初始位置定位机构设计与性能分析".(2010).

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