| 几种微构件材料的表面能及纳观黏附行为研究 | |
| 薛伟 ; 郑蓓蓉 ; 张淼 ; 解国新 ; 王权 ; Xue Wei ; Zheng Bei-Rong ; Zhang Miao ; Xie Guo-Xin ; Wang Quan | |
| 2010-06-08 ; 2010-06-08 | |
| 关键词 | MEMS 表面能 纳观黏附 粗糙度 MEMS,surface energy,nano-adhesion,roughness O485 |
| 其他题名 | The surface energy and nano-adhesion behavior of some micro-component material in MEMS |
| 中文摘要 | 对微机电系统(MEMS)中几种常用构件材料的表面能及其主要影响因素进行了探讨,并与材料表面的纳观黏附性能进行了分析比较.用Owens二液法计算出硅基材料的表面能在60—75mJ/m2之间,它们之间总表面能的差异主要归结为表面能极性分量的差异,表面粗糙度的存在使表观表面能有所偏高.施加自组装分子膜后的表面能大为降低,粗糙度的存在可以使其表面能进一步减小.纳观黏附力和表面能之间有一定的对应关系.另外,在研究中发现表面粗糙度对纳观黏附行为的影响较小.; This paper compares and discusses the surface energy and its related factors between different kinds of micro-component materials commonly used in MEMS,and analyzes the nano-adhesion behaviors of their surfaces.The results by the Owens method show that the surface energies of the silicon-based materials are between 60—75 mJ/m2 and the presence of surface roughness would result in higher nominal surface energy when the contact angle is less than 90°.In contrast,the nominal surface energy would go much lower when the surface is rough with the coverage of a SAM film.There is a certain dependence of nano-adhesion on surface energy,and the effect of surface roughness on nano-adhesion can be neglected in the present study.; 浙江省自然科学基金(批准号:Y107746)资助的课题~~ |
| 语种 | 中文 ; 中文 |
| 内容类型 | 期刊论文 |
| 源URL | [http://hdl.handle.net/123456789/49506]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | 薛伟,郑蓓蓉,张淼,等. 几种微构件材料的表面能及纳观黏附行为研究[J],2010, 2010. |
| APA | 薛伟.,郑蓓蓉.,张淼.,解国新.,王权.,...&Wang Quan.(2010).几种微构件材料的表面能及纳观黏附行为研究.. |
| MLA | 薛伟,et al."几种微构件材料的表面能及纳观黏附行为研究".(2010). |
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