| 利用脉冲激光真空弧沉积技术制备类金刚石薄膜 | |
| 蒋娜娜 ; 邵天敏 ; 陈大融 ; JIANG Na-Na ; SHAO Tian-Min ; CHEN Da-Rong | |
| 2010-06-08 ; 2010-06-08 | |
| 关键词 | 脉冲激光真空弧 类金刚石薄膜 激光拉曼 摩擦系数 pulsed-laser-arc diamond like carbon film laser raman spectroscopy friction coefficient TB43 |
| 其他题名 | Pulsed-laser-arc Deposition of Diamond Like Carbon Films |
| 中文摘要 | 介绍了一种新的脉冲激光真空弧沉积技术,利用该技术在硅基片上制备了类金刚石薄膜.利用激光拉曼分析技术对沉积膜进行了结构分析,结果表明沉积膜为非晶结构,具有明显的sp3结构特征.同时利用纳米划痕压痕仪、原子力显微镜等分析设备对膜的表面形貌、微观摩擦学性能进行了分析,结果表明Si<100>基片上沉积膜的表面形貌和微观摩擦学性能略优于Si<111>基片上沉积的薄膜,其摩擦系数平均值为0.036.; Pulsed-laser-arc deposition technique was introduced. Diamond like carbon (DLC) films were deposited on Si<111> and Si<100> respectively. Results of laser raman spectroscopy showed that the as-deposit films were amorphous, having obvious sp3 structure. Meanwhile, surface topography and micro-tribological character were investigated by using atomic force microscope and nano-scratch tester. The results show that the surface microstructure and micro-tribological character of the film deposited on Si<100> is better than that deposited on Si<111>. The average friction coefficient of the film on Si<100> is 0.036.; 国家自然科学基金(50135040) |
| 语种 | 中文 ; 中文 |
| 内容类型 | 期刊论文 |
| 源URL | [http://hdl.handle.net/123456789/48557]  |
| 专题 | 清华大学 |
| 推荐引用方式 GB/T 7714 | 蒋娜娜,邵天敏,陈大融,等. 利用脉冲激光真空弧沉积技术制备类金刚石薄膜[J],2010, 2010. |
| APA | 蒋娜娜,邵天敏,陈大融,JIANG Na-Na,SHAO Tian-Min,&CHEN Da-Rong.(2010).利用脉冲激光真空弧沉积技术制备类金刚石薄膜.. |
| MLA | 蒋娜娜,et al."利用脉冲激光真空弧沉积技术制备类金刚石薄膜".(2010). |
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